*mydirectindustry

Catalogs
VAT Vakuumventile AG
Atmospheric door L-VAT

Atmospheric door L-VAT

Product catalog summary

Overview: This document provides technical specifications and options for aluminum and stainless steel double-acting pneumatic actuators with position indicators, designed for SEMI applications such as load lock chambers. The actuators are available in different sizes and configurations, with options for solenoid impulse actuation and various sealing materials.

Specifications:

Materials: Aluminum or stainless steel for the gate, with FKM (VITON) as the standard sealing material.
Pressure Range: 1 · 10^-9 mbar to 1.1 bar (abs).
Leak Rate: Less than 1 · 10^-9 mbar Is^-1.
Temperature: Operating temperatures vary based on configuration, up to 200°C for stainless steel without solenoid.
Cycle Life: At least 3 million cycles until first service.

Dimensions and Ordering:

Available sizes include 46 x 236 mm (1.8 x 9.3 inches) and 50 x 336 mm (1.9 x 13.2 inches).
Ordering numbers differ based on material and type (U or V).

Options:

Solenoid for impulse actuation (24 V DC).
Position indicator with electromagnetic sensors and LED display.
Various gate seal materials and sizes, including vulcanized and O-ring options.
Gate shield for protection from coating and radiation heating.

Technical Data:

Air connection options include solenoid quick connect fittings or R ⅛" internal thread.
Position indicator contact rating: Voltage ≤ 50 V AC/DC, Current ≤ 0.5 A, Power max. 10 W.
Mounting position is flexible.

Applications: Designed for atmospheric pressure operations, particularly in SEMI applications, ensuring minimal particle and vibration interference.

Catalog excerpts

Atmospheric door L-VAT Series 075 Transfer door-valve for SEMI applications For operation in atmospheric pressure, e. g. load lock chambers No vacuum seals on actuator Virtually particle and vibration free L-motion Gate material aluminum or stainless steel Aluminum double acting pneumatic actuator with position indicator Ordering numbers type U with solenoid for impulse actuation: 075 . . - . A44 (specify control voltage) Additional opening sizes: see «Options» Stainless steel double acting pneumatic actuator with position indicator Ordering numbers type U with solenoid for impulse actuation: 075 . . - . E44 (specify control voltage) Additional opening sizes: see «Options»

Open the catalog to page 1

Series 07 Door types C Mounting surface of actuator body perpendicular to door opening Actuator body mounted on chamber wall L-VAT configuration (see glossary) Vulcanized gate seal (see glossary) Pneumatically locked in closed position, even without compressed air supply Sealing material Actuator: - Solenoid for impulse actuation 24 V DC - Position indicator with electro-magnetic sensors and LED display - Actuator cover kit to cover the pistons and cylinders of the actuator Gate: - Gate seal O-ring - Different opening sizes: 37 x 336 / 435 / 510 mm (gate seal vulcanized) 51 x 160 / 210 / 265...

Open the catalog to page 2

Atmospheric door L-VAT Technical data Leak rate: gate Pressure range Differential pressure on the gate - in closing direction - in opening direction Differential pressure at opening Cycles until first service operating temperature of valve configurations valve gate position indicator stainless steel actuator solenoid Material - Gate: aluminum - Gate: stainless steel Seal: gate Mounting position conditions and sealing materials quick connect fittings for pneumatics for tubing O.D. 4 mm R ⅛" internal thread Position indicator: contact rating - Voltage - Current - Power - Connection Maximum values:...

Open the catalog to page 3

Series 07 Dimensions Type U

Open the catalog to page 4

Atmospheric door L-VAT

Atmospheric door L-VAT

Catalog excerpts

All VAT Vakuumventile AG catalogs and technical brochures