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Pendulum valve control system Series 65.0 Main applications Downstream pressure control and isolation valve for SEMI and FPD processes Optimal for corrosive etching and cleaning processes Ordering information Valve with stepper motor and integrated pressure controller Ordering numbers aluminum aluminum, hard anodized JIS Controller configurations: basic version with SPS with PFO with SPS and PFO basic version with VC master with SPS and VC master with PFO and VC master with SPS, PFO and VC master SPS = Sensor Power Supply (±15 V DC power supply for sensor) PFO = Power Failure Option (valve closes / opens automatically at power failure) VC = Valve Cluster (for operating several valves synchronously) Example: 65040-PAGG = Aluminum valve with ISO-F DN 100 flanges, RS232 interface, for 1 sensor G = RS232 1 2 H = RS232 C = Logic 1 E = Logic 2 P = DeviceNet ® 1 Q = DeviceNet ® 2 D = Profibus 1 F = Profibus 2 J = RS485 1 K = RS485 2 Y = Ethernet 1 Z = Ethernet 2 L = CC-Link 1 N = CC-Link 2 I = EtherCAT 1 X = EtherCAT 2 S = VC slave (without interface) Pressure controller: see pages 146 – 149

Functional principle Bodymaterial: aluminum or aluminum, hard anodized Compact design Fast, virtually particle-free and shockfree operation Integrated or external pressure controller Extremely short control response times Position indication Service port for connecting a computer or a service box 2 Easy maintenance Plate Sealing ring Plate seal Body seal Bonnet seal Actuator shaft Actuator Controller Shaft feedthrough seal Rotary feedthrough seal Piston ring seal Valve seat side The plate acts as a throttling element and varies the conductance of the valve opening. The pressure controller...

Pendulum valve control system Technical data Leak rate 1): valve body – Aluminum – Aluminum, hard anodized Leak rate 1): valve seat – Aluminum – Aluminum, hard anodized Operating time for throttling Typical closing / opening time Compressed air min. – max. overpressure Max. differential pressure during operation Max. differential pressure on the plate Minimum controllable conductance (molecular flow) Conductance (molecular flow) rotary feedthrough shaft feedthrough Feedthrough – Actuator – Sealing ring Valve seat on chamber side recommended Seal: bonnet, plate, body, feedthrough Material –...

Series 65 Options Certain options are not available for some nominal diameters or cannot be combined. Moreover, options can affect the general technical data. – Controller with configurable PID parameters (adaptive, upstream, downstream, soft-pump) – RS232 interface with 2 analog outputs Valve – Other sizes, e. g. DN 80 Actuator on B1-side (standard) – Other flanges, e. g. ASA-LP – Customer specified flanges, e. g. rectangular flange for direct mounting to chamber – Surface treatment, e. g. nickel-plated – Other sealing materials – KF ports in body – Heater with insulation (Pic. 2) for...

Pendulum valve control system Easy maintenance – Valve need not be removed from the system – Fast removal and reinstallation of plate and sealing ring – Only 2 standard tools required Main dimensions Valve with stepper motor and integrated pressure controller DN 100 – 400 (4" – 16") Connection box for heated valves Insulation for heated valves Valve seat side Required for dismantling Compressed air connection Electrical connection Position indicator

Series 65 Flange dimensions ISO-F  DN 100 – 400 (4" – 16") Valve seat side

Pressure controllers for valves Series 65.0 Features Integrated or external pressure controller, depending on valve type Automatic learning of system parameters Extremely short control response times Fast and accurate pressure control Valve position control Remote control or local operation Input for pressure sensor Information display By operating the LEARN function – needs to be done only once at start-up – the system parameters are automatically determined. Due to the adaptive algorithm the controller continuously adapts to the process conditions (species of gas, gas flow) and thus...

Remote control via computer Control via computer by using the CPA software developed by VAT offers comfortable functions such as - Graphical illustration ofthe pressure behavior - Programming and recording of sequences - Several possibilities for data analysis and process optimization Cycle Counter Power Fail Status Sealing Status Pressure Control Learn Parameter Chart Analyzer Firmware Download Operating Manual Record '| 00:00:00.00 | Pause *|| Ctear |f Analyze COM1-384007E-1 connected valve G1238 PACH AKB1/0001 The software -Control Performance Analyzer (CPA)- may be downloaded for free...

Pressure controllers for valves Integrated controller: Series 65.0 (external controller available as an option) Available interfaces: – Logic – RS232 – RS485 – DeviceNet ® – Ethernet – Profibus – CC-Link – EtherCAT Power consumption – Controller + motor – Power failure option (PFO) – Sensor power supply (SPS) Sensor supply Sensor input – Signal voltage – Input resistance – Resolution – Sampling rate 0 – 10 V DC linear with pressure Ri = 100 kΩ 0.23 mV 10 ms Control accuracy Position resolution ≥ 9155 (depending on nominal diameter) The higher value applies