*mydirectindustry

Catalogs
VAT Vakuumventile AG
07.5 SERIES - TRANSFER DOOR L-VAT

07.5 SERIES - TRANSFER DOOR L-VAT

Product catalog summary

Main Features
The Transfer Door L-VAT Series 07.5 is designed for load lock and process chamber isolation in semiconductor production systems. It features opening sizes ranging from 46 to 336 mm (1.81" to 13.23") and utilizes a pneumatic actuator that is double-acting with a position indicator. The body is made of aluminum, and it employs L-VAT sealing technology.

Functional Principle
This series is used on the atmospheric side of semiconductor production systems to isolate chambers. It offers two door types, U and V, with the actuator body mounted to the chamber wall.

Technical Data
The valve has a leak rate of less than 1 · 10^-9 mbar ls^-1 with an FKM seal. It operates within a pressure range of 1 · 10^-9 mbar to 1.1 bar (abs) and can withstand a differential pressure of 1 bar in the closing direction. The valve is designed for over 3 million cycles before requiring service and can operate at temperatures up to 80°C.

Materials and Configuration
The gate is made from aluminum or stainless steel, with seals available in FKM, FFKM, and VMQ. The actuator can be mounted in various positions, and the solenoid valve operates at 24 V DC.

Options and Custom Solutions
Options include different sealing materials and configurations, such as hard anodized or nickel-plated gates. An actuator cover kit is available to protect the pistons and cylinders.

Ordering Information
Standard valves are available in aluminum and stainless steel, with or without solenoid valves. Custom options can be specified with an "-X" suffix in the ordering number.

Dimensions
Detailed dimensions are provided for different door types and sizes, ensuring compatibility with various system configurations.

Catalog excerpts

TRANSFER DOOR L-VAT SERIES 07.5 Low cost of ownership Easy installation Protected pressure bar possibleMAIN FEATURES Opening sizes 46 * 236 mm to 50 * 336 mm (1.81" * 9.29" to 1.97" * 13.23") Actuator pneumatic: double acting with position indicator Body material aluminum Sealing technology L-VAT: see glossary FUNCTIONAL PRINCIPLE Door type V 1 Gate 2 Chamber 3 Actuator body Actuator body mounted to chamber wall Mounting surface of actuator body perpendicular to door opening

Open the catalog to page 1

TRANSFER DOOR L-VAT, SERIES 07.5 TECHNICAL DATA Leak rate Gate: blank or nickel-plated - with FKM seal - with FFKM seal - with VMQ seal Gate: hard anodized - with FKM or FFKM seal Pressure range on vacuum side Differential pressure on the gate Differential pressure at opening Cycles until first service Temperature 1) Aluminum gate Stainless steel gate Mounting position Impulse solenoid valve Position indicator: contact rating Voltage Current Power Connection With solenoid valve Without solenoid valve CDA flow rate quick connector O. D. 4 mm, tube length ^ 1 m RW internal thread, tube length...

Open the catalog to page 2

TRANSFER DOOR L-VAT SERIES 07.5 SPARE PARTS ACTUATOR - Actuator cover kit to cover the pistons and cylinders of the gate pressure bar VALVE - Other sealing materials, e. g. FFKM, VMQ, FVMQ gate seal - O-ring seal in gate (Dia. 1) instead of the vulcanized seal (standard) - Gate: hard anodized or nickel-plated We can offer a wide variety of spare parts. Please contact us for details and an offer. Thank you for specifying the fabrication number of the valve indicated on the identification tag when asking for spare parts. Other sizes on request Door type U with pneumatic actuator double acting with...

Open the catalog to page 3

Open the catalog to page 4

07.5 SERIES - TRANSFER DOOR L-VAT

07.5 SERIES - TRANSFER DOOR L-VAT

Catalog excerpts

All VAT Vakuumventile AG catalogs and technical brochures