Transfer valve/insert MONOVAT For SEMI applications handling For load lock / process module isolation Virtually particle and vibration-free >5 million cycles between maintenance Very easy maintenance thanks to self-adjusting plate Body material aluminum or stainless steel double acting pneumatic actuator with position indicator double acting pneumatic actuator SEMI E21-94 with position indicator SEMI E21-94 with solenoid for impulse actuation: 022 . . -. . 44 (specify control voltage) Other opening sizes: see «Options» with solenoid for impulse actuation: 032 . . -. . 44 (specify control voltage) Other opening sizes and insert types: see «Options»

Sealing materials Gate: FKM (VITON, vulcanized) Bonnet flange: FKM (VITON, O-ring) Body flange (seat side): Feedth rough Bellows feedthrough (welded bellows) inside, protected 3 vulcanized gate seal 4 bonnet flange seal 6 body flange seal 7 body flange sealing V valve seat side Compact design Modular system, same actuator for different valve sizes Maintenance-free actuator, self-adjusting gate without detached mounting parts V valve seat side V valve seat side Opening on rear side larger than on seat Same size of opening on seat side and side rear side With bonnet flange Gate service through...

Transfer valve/insert MONOVAT Technical data Leak rate1) at body and at seat in mbar Is-1 At room temperature (25°C) and under clean environmental conditions. Maximum values: depending on operating conditions and sealing materials In order to maximize the life time of the gate; the operating pressure should be kept as low as possible, however high enough to ensure the required leak rate in the closed valve position. Depending on the length of the sealing line (size of gate), tolerances of the sealing lip, accuracy of the measurement and required leak rate, the ope- rating pressure settings may...

Valve body: • Opening sizes: - Other opening sizes on request, max. 56 x 700 mm • Body flange: - Sealing surface or groove with O-ring - Sealing materials (O-ring): FKM, FFKM - Metal seal (for stainless steel) - Other sealing materials on request - Bolt pattern outside or inside of the sealing line - Alignment pins, alignment holes • Surface treatment: -Aluminum: hard anodized or nickel-plated - Aluminum / stainless steel: ball-polished - Sealing surfaces for metal flange seal - Metal seal on bonnet flange - Bellows assembly welded to bonnet flange • Temperature management: - Valve body prepared...

Transfer valve/insert MONOVAT Dimensions: Valve Series 022 Valve seat side Rear side: type B Rear side: type A V valve seat side

Dimensions: Insert Series 032