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Vacuum Valves

Vacuum Valves

Product catalog summary

Introduction
Vacuum valves are essential components in vacuum systems, used to control vacuum lines or directly at the vacuum chamber. They are available for applications ranging from rough to ultra-high vacuum. This document provides an overview of various vacuum valves, including ball valves, angle valves, gate valves, special valves, and their applications and specifications.

Ball Valves
Ball valves are suitable for rough and medium vacuum conditions. They come in two-way and three-way configurations, made from brass or stainless steel. Two-way valves use an axially bored ball for flow control, while three-way valves offer L-bore or T-bore configurations for connection combinations.

Angle Valves
Angle valves are cost-effective for high vacuum applications, available in aluminum or stainless steel, with manual, pneumatic, and electromagnetic variants. They are designed for low leak rates, suitable for industrial and research applications.

Gate Valves
Gate valves are used in high and ultra-high vacuum applications, offering small installation lengths and maximum conductance. They are primarily used as stop valves for pumping or sluice systems, with manual or pneumatic actuation.

Special Valves
Special valves include vent valves, overpressure valves, gas dosing valves, and soft vent valves, designed for specific applications such as automated systems and precise gas dosing.

Valve Accessories
The document covers valve accessories like control valves, position indicators, connectors, baffles, and compressed-air hoses, aiding in the installation and operation of vacuum valves.

Technical Specifications
Detailed technical specifications are provided for each valve type, including materials, pressure ranges, leak rates, and operating temperatures, along with order codes and dimensions.

Specifications

Types: Includes series like 2AVP, 2AVPS1, 4AVP, and 8AVE, featuring solenoid valves, autoswitches, and different actuation methods.
Pressure Range: Operates from 1.0E-8 mbar to atmosphere, with helium leak rates below 1.0E-9 mbar l/s.
Materials: Stainless steel and aluminum housings, with stainless steel bellows and FPM seals.
Temperature Range: Operating temperatures generally between 5°C and 150°C, with high-temperature versions available.
Durability: Designed for long service life, with durability ranging from 500,000 to 2,000,000 cycles.

Procedures and Options

Actuation: Primarily single-acting and pressureless closed, with double-acting drive options.
Mounting and Indicators: Can be mounted in any position, with visual and electric position indicators available.
Customization: Options include high-temperature versions, different sealing materials, and additional accessories.

Connection and Conductance

Available with KF and ISO-K flanges, with conductance values specified for each model, ranging from 5 to 160 l/s.

Additional Features

Some models include integrated control electronics and autoswitches, suitable for automated processes.
Electromagnetic valves feature integrated control electronics for coil performance.

UHV Gas Dosing Valves

Specifications: All-metal construction with sapphire sealing, manual actuation, and CF flange connections.
Performance: Control range from 2.0E-10 to 1 mbar l/s, pressure range from 1.0E-11 mbar to 1 bar, and helium leak rate below 1.0E-10 mbar l/s.
Materials: Stainless steel housing, copper alloy valve plate, and sapphire sealing gasket.
Durability: Up to 300 cycles without baking, reduced cycles at higher bakeout temperatures.

Gate Valves

Types: Includes standard HV, UHV, and pneumatic gate valves with various flange connections.
Specifications: Pressure ranges from 1.0E-9 mbar to atmosphere, helium leak rates below 2.0E-9 mbar l/s, and operating temperatures up to 150°C.
Materials: Stainless steel housing, AM350 bellows, and FPM seals.
Options: Various flange standards and high-temperature microswitches.

Rectangular Gate Valves

Design: Aluminum construction with pneumatic drive, suitable for semiconductor production.
Performance: Pressure range from 1.0E-8 mbar to atmosphere, with low particle emission and high durability.
Connections: Available in standard, half-height, and full-height MESC cassette housings.

Valve Accessories

Control Valves: Kits for single and double-acting pneumatic valves, including solenoid valves and connectors.
Position Indicators: Reed and electronic switches with LED indicators for position monitoring.

Conclusion
The document provides comprehensive technical details for selecting and utilizing vacuum valves and accessories in various industrial applications, emphasizing durability, material quality, and operational efficiency.

Connectors, Silencers, and Compressed-Air Hoses

Connectors: Categorized by thread types and functionalities, with details on materials and dimensions.
Silencers: Available in materials like sintered bronze and plastics, with varying attenuation levels.
Compressed-Air Hose: Polyurethane hoses sold by the meter, with specifications for outer and inner diameters.

Catalog excerpts

Vacuum Valves Ball Valves Angle Valves In-line Valves Gate Valves Valve Accessories

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Contents Introduction Ball Valves 2-Way Ball Valves 3-Way Ball Valves Angle Valves Manual Pneumatic Electromagnetic In-line Valves Manual Pneumatic Electromagnetic Page 9-6 to 9-8 Page 9-9 to 9-16 Page 9-17 to 9-18 Page 9-19 to 9-21 Page 9-21 Page 9-24 Special Valves Smooth Exhaust Angle Valves Gas Shut-off Valves Overpressure Valves Vent Valves Softvent Valves High Vacuum Needle Valves UHV Gas Dosing Valves Page 9-27 Page 9-28 Page 9-29 Page 9-30 Page 9-30 Page 9-31 to 9-32 Gate Valves Manual Pneumatic With Special Equipment Valve Accessories Control Valves Including Assembly Kit Position Indicators...

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Vacuum Valves Introduction Vacuum valves are essential shut-off elements for any vacuum system. They are used in vacuum lines or directly at the vacuum chamber. We provide you a large selection of vacuum valves for many applications in rough, medium, high, and ultra high vacuum. In the following we give an overview of the available vacuum valves and their applications. Ball valves are particularly suitable for rough vacuum. Under certain conditions they can also be used in medium vacuum. We offer two- and three-way ball valves of brass or stainless steel. Two-way ball valves possess an in the...

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Ball Valves 2-way ball valves, manual Brass (nickel plated) housing Technical data Series Description Actuation Connection Pressure range Pressure resistance of housing Pass He leak rate Housing construction Housing material Flange material Ball seal material Drive seal material Thread seal material Operating temperature Mounting position Visual position indicator Options Order code ZKH-M 2-way ball valve for use in rough vacuum - applicable for noncorrosive media manual with handle KF flange 1 mbar to atmosphere PN20 (without flange tube) optically free < 1.0E-7 mbar l/s one-part brass, nickel...

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Ball Valves 3-way ball valves, manual Stainless steel housing Technical data Series Description Actuation Connection Pressure range Pressure resistance of housing He leak rate Housing construction Housing material Flange material Ball seal material Drive seal material Thread seal material Operating temperature Mounting position Visual position indicator Options Order code DKH-S 3-way ball valve with L or T boring for use in rough vacuum - applicable for non or slightly corrosive media manual with handle, switchover possibly overlapping KF flange 1 mbar to atmosphere PN30 (without flange tube)...

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Angle Valves Compact, manual Aluminum housing Technical data Series Description Actuation Connection Pressure range He leak rate Seal drive Housing construction Housing material Bellows material Valve plate material Housing seal material Seal valve plate material Operating temperature Mounting position Visual position indicator Durability until first service Order code 2AVM..-A compact and light high vacuum angle valve, aluminum - applicable for noncorrosive processes and applications manual with handwheel KF flange 1.0E-8 mbar to atmosphere < 1.0E-9 mbar l/s hydroformed bellow 2-parts, actuator...

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Angle Valves KF Valve, HV, manual Aluminum or stainless steel housing Technical data Series Description Actuation Connection Pressure range Impermeability valve seat Impermeability housing Seal drive Housing material Housing seal material Seal valve plate material Operating temperature Mounting position Durability until first service 3AVM manual used angle valve with KF flange for HV applications manual with handwheel KF flange 1.0E-9 mbar to 3 bar < 1.0E-9 mbar l/s < 1.0E-9 mbar l/s bellow stainless steel / aluminum FPM FPM -30 ... 130 °C any 50,000 cycles Order code Stainless steel Standard...

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Angle Valves CF Standard UHV, manual Stainless steel housing Technical data Series Description Actuation Pressure range Impermeability valve seat Impermeability housing Seal drive Housing construction Housing material Bellows material Valve plate material Housing seal material Seal valve plate material Operating temperature Bakeout temperature opened Mounting position Visual position indicator Durability until first service Order code 4AVM-..-MV competitive, rugged and versatile applicable UHV angle valve - metal sealed housing manual with handwheel 1.0E-9 mbar to atmosphere < 1.0E-9 mbar l/s...

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Angle Valves KF Valve, HV, pneumatic Aluminum or stainless steel housing Technical data Series Description Actuation Connection Pressure range Impermeability valve seat Impermeability housing Seal drive Housing material Housing seal material Seal valve plate material Operating temperature Mounting position Position Indicator/ control valve Durability until first service 3APV pneumatic driven angle valve with KF flange for HV applications pneumatic NC (NO on request) KF 1.0E-8 mbar to 3 bar < 1.0E-9 mbar l/s < 1.0E-9 mbar l/s bellow stainless steel / aluminum FPM FPM -30 ... 130 °C any on request...

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Angle Valves Compact, pneumatic Aluminum housing Technical data Series Description Actuation Connection Pressure range He leak rate Seal drive Air pressure Housing construction Housing material Bellows material Valve plate material Housing seal material Seal valve plate material Operating temperature Power supply control valve Scope of delivery of the series 2AVPS1-...-A-P Mounting position Visual position indicator Electric position indicator Durability until first service Other options Order code 2AVP-..-A compact and light high vacuum angle valve, aluminum, with pneumatic drive, - type 2AVP...

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Angle Valves Compact, pneumatic Stainless steel housing Technical data Series Description Actuation Connection Pressure range He leak rate Seal drive Air pressure Housing construction Housing material Bellows material Valve plate material Housing seal material Seal valve plate material Operating temperature Power supply control valve Scope of delivery of the series 2AVPS1-...-S-P Mounting position Visual position indicator Electric position indicator Durability until first service Other options Order code 2AVP-..-S compact high vacuum angle valve, stainless steel with pneumatic drive, - type...

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Vacuum Valves

Vacuum Valves

Catalog excerpts

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