Vacuum Valves
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Vacuum Valves - 1

Vacuum Valves Ball Valves Angle Valves In-line Valves Gate Valves Valve Accessories

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Vacuum Valves - 2

Contents Introduction Ball Valves 2-Way Ball Valves 3-Way Ball Valves Angle Valves Manual Pneumatic Electromagnetic In-line Valves Manual Pneumatic Electromagnetic Page 9-6 to 9-8 Page 9-9 to 9-16 Page 9-17 to 9-18 Page 9-19 to 9-21 Page 9-21 Page 9-24 Special Valves Smooth Exhaust Angle Valves Gas Shut-off Valves Overpressure Valves Vent Valves Softvent Valves High Vacuum Needle Valves UHV Gas Dosing Valves Page 9-27 Page 9-28 Page 9-29 Page 9-30 Page 9-30 Page 9-31 to 9-32 Gate Valves Manual Pneumatic With Special Equipment Valve Accessories Control Valves Including Assembly Kit Position...

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Vacuum Valves - 3

Vacuum Valves Introduction Vacuum valves are essential shut-off elements for any vacuum system. They are used in vacuum lines or directly at the vacuum chamber. We provide you a large selection of vacuum valves for many applications in rough, medium, high, and ultra high vacuum. In the following we give an overview of the available vacuum valves and their applications. Ball valves are particularly suitable for rough vacuum. Under certain conditions they can also be used in medium vacuum. We offer two- and three-way ball valves of brass or stainless steel. Two-way ball valves possess an in...

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Vacuum Valves - 4

Ball Valves 2-way ball valves, manual Brass (nickel plated) housing Technical data Series Description Actuation Connection Pressure range Pressure resistance of housing Pass He leak rate Housing construction Housing material Flange material Ball seal material Drive seal material Thread seal material Operating temperature Mounting position Visual position indicator Options Order code ZKH-M 2-way ball valve for use in rough vacuum - applicable for noncorrosive media manual with handle KF flange 1 mbar to atmosphere PN20 (without flange tube) optically free < 1.0E-7 mbar l/s one-part brass,...

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Vacuum Valves - 5

Ball Valves 3-way ball valves, manual Stainless steel housing Technical data Series Description Actuation Connection Pressure range Pressure resistance of housing He leak rate Housing construction Housing material Flange material Ball seal material Drive seal material Thread seal material Operating temperature Mounting position Visual position indicator Options Order code DKH-S 3-way ball valve with L or T boring for use in rough vacuum - applicable for non or slightly corrosive media manual with handle, switchover possibly overlapping KF flange 1 mbar to atmosphere PN30 (without flange...

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Vacuum Valves - 6

Angle Valves Compact, manual Aluminum housing Technical data Series Description Actuation Connection Pressure range He leak rate Seal drive Housing construction Housing material Bellows material Valve plate material Housing seal material Seal valve plate material Operating temperature Mounting position Visual position indicator Durability until first service Order code 2AVM..-A compact and light high vacuum angle valve, aluminum - applicable for noncorrosive processes and applications manual with handwheel KF flange 1.0E-8 mbar to atmosphere < 1.0E-9 mbar l/s hydroformed bellow 2-parts,...

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Vacuum Valves - 7

Angle Valves KF Valve, HV, manual Aluminum or stainless steel housing Technical data Series Description Actuation Connection Pressure range Impermeability valve seat Impermeability housing Seal drive Housing material Housing seal material Seal valve plate material Operating temperature Mounting position Durability until first service 3AVM manual used angle valve with KF flange for HV applications manual with handwheel KF flange 1.0E-9 mbar to 3 bar < 1.0E-9 mbar l/s < 1.0E-9 mbar l/s bellow stainless steel / aluminum FPM FPM -30 ... 130 °C any 50,000 cycles Order code Stainless steel...

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Vacuum Valves - 8

Angle Valves CF Standard UHV, manual Stainless steel housing Technical data Series Description Actuation Pressure range Impermeability valve seat Impermeability housing Seal drive Housing construction Housing material Bellows material Valve plate material Housing seal material Seal valve plate material Operating temperature Bakeout temperature opened Mounting position Visual position indicator Durability until first service Order code 4AVM-..-MV competitive, rugged and versatile applicable UHV angle valve - metal sealed housing manual with handwheel 1.0E-9 mbar to atmosphere < 1.0E-9 mbar...

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Vacuum Valves - 9

Angle Valves KF Valve, HV, pneumatic Aluminum or stainless steel housing Technical data Series Description Actuation Connection Pressure range Impermeability valve seat Impermeability housing Seal drive Housing material Housing seal material Seal valve plate material Operating temperature Mounting position Position Indicator/ control valve Durability until first service 3APV pneumatic driven angle valve with KF flange for HV applications pneumatic NC (NO on request) KF 1.0E-8 mbar to 3 bar < 1.0E-9 mbar l/s < 1.0E-9 mbar l/s bellow stainless steel / aluminum FPM FPM -30 ... 130 °C any on...

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Vacuum Valves - 10

Angle Valves Compact, pneumatic Aluminum housing Technical data Series Description Actuation Connection Pressure range He leak rate Seal drive Air pressure Housing construction Housing material Bellows material Valve plate material Housing seal material Seal valve plate material Operating temperature Power supply control valve Scope of delivery of the series 2AVPS1-...-A-P Mounting position Visual position indicator Electric position indicator Durability until first service Other options Order code 2AVP-..-A compact and light high vacuum angle valve, aluminum, with pneumatic drive, - type...

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Vacuum Valves - 11

Angle Valves Compact, pneumatic Stainless steel housing Technical data Series Description Actuation Connection Pressure range He leak rate Seal drive Air pressure Housing construction Housing material Bellows material Valve plate material Housing seal material Seal valve plate material Operating temperature Power supply control valve Scope of delivery of the series 2AVPS1-...-S-P Mounting position Visual position indicator Electric position indicator Durability until first service Other options Order code 2AVP-..-S compact high vacuum angle valve, stainless steel with pneumatic drive, -...

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