Model VSS-450-300 Vacuum Soldering System for processing of 300 mm x 300 mm substrates - also for contaminating processes  Ramp up rate up to 120 K/min Control SIMATIC® with 7" touch panel Process gas line with MFC for N2 Horizontal automatical open/close Ppicture similar Technical and design changes reserved Precise fast ramp up and fast ramp down rates Reflow Solder Processes with flux Operation with inert gas, Oxygen, Hydrogen , Forming gas, Formic Acid Excellent temperature uniformity Lead free soldering Integrated data logging Resistor paste firing Heated by Infrared Lamps 50 programs with 50 steps each Small foot print UniTemp GmbH Luitpoldstr. 6 85276 Pfaffenhofen/Ilm

Vacuum Soldering oven as table top version Programmable temperature profiles Record of process data Process in different gas atmospheres (inert gases) Perfect lab tool due to small dimensions and weight The VSS-450-300 Reflow Solder System is an excellent tool for various solder processes up to 300 mm diameter wafer or 300 mm x 300 mm substrate size and 50 mm height (Option: EH with 120 mm height). The system is vacuum capable of up to 10-3 hPa. Some examples for applications: Laboratory furnace for all kind of developers implementing and researching new processes, prototype research, environmental...

Chamber material Aluminium chamber (chamber area: 350 mm x 350 mm) Chamber height Vacuum capability Temp. unifomity Bottom heating: 2 x 12 IR Lamps crossed aligned (21 kW) Ramp down rate Flow Controller 1 Mass Flow controller für Nitrogen (5 nlm = norm liter per min) Cooling Chamber By external water cooler By external water cooler SIMACTIC® 50 programs with 50 steps each T E C H N I C A L D ATA Dimension oven Weight Electrical connection UniTemp GmbH Luitpoldstr. 6 85276 Pfaffenhofen/Ilm [email protected] www.unit

Unlvrrul frn|)iiri: jr* Procrnri VSS-FA Formic Acid module (Module with Vessel for using Formic acid) with gas line VSS-FA-T Formic Acid trap VSS-MFC Additional gas line with Mass Flow controller (total: max 4 gas lines) VSS-H2 Module for using 100% Hydrogen including one FM-EL (total: max. 4 gas lines) VSS-H2S Safety device to prevent uncontrolled emission of hydrogen VSS-LP Lift Pins (on request) VSS-ET Chamber height 120mm with viewing window (60mm diameter) VSS-TC Additional thermocouple to measure on device (plugged in chamber) for external measurement tool (max. 4) VAC I Basic Vacuum up...