UNIEMP U n I v«■ r i jI Trmptntu ft Procriiri Model VSS-300 Vacuum Soldering System for processing of 300 mm x 300 mm substrates - also for contaminating processes • For substrate size up to 300mm x 300mm • Ramp up rate up to 150 K/min • Control SIMATIC® with 7" touch panel • Vacuum up to 10-3 hPa (opt. 10-6 hPa) • Process gas line with MFC for N2 • Temperature up to 450 °C (opt. 650 °C) • Vertical automatical open/close Picture similar -Technical and design are subject to change Precise fast ramp up and fast ramp down rates Excellent temperature uniformity Up to 4 gas lines (MFC) Integrated data logging Heated by Infrared Lamps 50 programs with 50 steps each Small foot print 3 heating zones programmable UniTemp GmbH Luitpoldstr. 6 85276 Pfaffenhofen/Ilm • Reflow Solder Processes with flux • Operation with inert gas, Oxygen, Forming gas, Formic Acid • Lead and Lead-free SMT reflow • Resistor paste firin

Model VSS-300 • Vacuum Soldering oven as table top version • Programmable temperature profiles • Record of process data • Process in different gas atmospheres (inert gases) • Perfect lab tool due to small dimensions and weight APPLICATION The VSS-300 Reflow Solder System is an excellent tool for various solder processes up to 300 mm diameter wafer or 300 mm x 300 mm substrate size and 50 mm height (Option: EH with 120 mm height). Some examples for applications: Laboratory furnace for all kind of developers implementing and researching new processes, prototype research, environmental research purposes...

Model VSS-300 300 mm x 300 mm (heated area: 310 mm x 310 mm) Aluminium chamber (chamber area: 350 mm x 350 mm) 50 mm (Option: -ET up to 120 mm) Up to 10-3 hPa (optionally up to 10-6 hPa) 450 °C (optionally up to 650 °C) < 1,5 % of set temperature Bottom heating: 2 x 12 IR Lamps crossed aligned (18 kW) Option: top heating 3 heating zones are programmable Up to 150 K/min T= 450°C > 200°C: 120 K/min, T= 200°C > 100°C: 60 K/min 1 Mass Flow controller fur Nitrogen (5 nlm = norm liter per min) By external water cooler By external water cooler SPS Controller, SIMATIC, 50 programs with 50 steps each...

Model VSS-300OPTIONS VSS-FA VSS-FT VSS-MFC VSS-LP VSS-EH VSS-TC VSS-TH VAC I VAC II VCR VSS-SI VSS-RC VSS-CAB Formic Acid module (Module with Vessel for using Formic acid) with gas line Flux trap Additional gas line with Mass Flow controller (total: max 4 gas lines) Lift Pins (on request) Chamber height 120mm with viewing window (60mm diameter) Additional thermocouple to measure on device (plugged in chamber) for external measurement tool (max. 4) Top Heat in cover Vacuum basic for vacuum up to 3 hPa incl. vacuum sensor and valve (excl. pump) Vacuum comfort for vacuum up to 10-3 hPa incl. vacuum...