RSS-3X210
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Model RSS-3X210Compact Reflow Solder System with 3 heated zones For up to 12 wafers with 100mm dia. Temperature up to 300 °C Ramp up rate up to 120 K/min Ramp down rate 60 K/min with vacuum up to 10-3 hPa active cooling production machine with small foot print Technical and design changes reserved FEATURE • Precise ramp up and fast ramp down rates • Up to 4 internal gas lines • Data logging • hard coated heating plate with lift pins • SIMATIC controller with 7" touch panel • Small foot print APPLICATION • Reflow Solder Processes without flux • Operation with inert gas, Oxygen, Hydrogen , Forming gas, Formic Acid • Lead free soldering • Resistor paste firing UniTemp GmbH Luitpoldstr. 6 Tel: +(49)(0)8441-787663 info@unitemp.de

Model RSS-3X210 • Vacuum Soldering oven as table top version • Programmable temperature profiles • Record of process data • Process in different gas atmospheres (inert gases) • Perfect lab tool for small production purpose APPLICATION The RSS-3X210 Reflow Solder System is an excellent tool for various solder processes up to 100 mm diameter wafer (12 pcs in one run). Some examples for applications: Laboratory furnace for all kind of developers implementing and researching new processes, prototype research, environmental research purposes and for small pre-series or series. PROCESS...

Max. part qty/size 3 heated plates each 210mmx210mm for example: for 12 pc 100mm wafer diameter for parallel processing (using the lift pin option) Chamber material Aluminium chamber (chamber area: 210 mm x 630 mm) Vacuum capability Up to 10-3 hPa Temp. uniformity < 1,5 % of set temperature Heating IR Lamps crossed aligned (18 kW) Ramp up rate Up to 120 K/min Ramp down rate T= 300°C > 200°C: 90 K/min Flow Controller Mass Flow Controller for process gas Nitrogen 5 nlm Cooling Chamber By external water cooler Cooling Hot Plate By external water cooler Controller...

Lift Pin Lift pins for lift up and down for 12 wafers with 100mm diameter each FA I Formic Acid Module - with Mass Flow Controller (external module - able for later retrofit) FA II Formic Acid Option with internal gas line and Mass Flow Controller FA III Formic Acid Option , the gas line is shared with the standard N2 Mass Flow Controller FT Flux trap (for pump protection) H2 Hydrogen option with Safety device (Sensor and Hydrogen monitoring) H2S Safety device for Hydrogen option (with cover and sensor) IL Interlock mechanism to prevent unintentional opening of the...