Model 2Z-HVSHigh Vacuum Sealer with 2 heating zones (with getter activation) • For sealing of MEMS • 2 models: 2Z-HVS-100 (6 adapters 16 mm dia.) 2Z-HVS-200 (6 adapters 42 mm dia.) • Temperature up to 450 °C • Top and bottom heating • Ramp up rate up to 20 K/min (in vacuum) • Ramp down rate up to 20 K/min (dto.) • Horizontal automatical open/close Technical and design changes reserved Bottom and top heating Up to 4 internal gas lines Data logging Vacuum up to 10-6 hPa PID Controller Optical process control by 360 ° Sealing and thermic encapsulation of MEMS (Micro-Electro-Mechanical Systems) Getter activation (Deposition of reactive material that is placed inside a vacuum system) Component separation during thermal processing in 2 temperature zones UniTemp GmbH Luitpoldstr. 6 Tel: +(49)(0)8441-787663 [email protected]

Model 2Z-HVS • High Vacuum Sealer for MEMS • Programmable temperature profiles • Record of process data • Getter activation • 2 temperature zones APPLICATION The 2Z-HVS is a high vacuum sealing unit which allows the hermetically sealing of MEMS. An electronic component can be processed before sealing in 2 heating zones with different temperatures up to 450°C. This allows also the getter activation. Up to 6 packages can be processed in parallel. A key feature is the automatical positioning and sealing of the parts, where both components must have the same temperature. The control of different heat-up...

Heated area Adapter (Qty) Max. substrate size Vacuum capability Temperature max. Temp. unifomity Ramp up rate Ramp down rate Flow Controller Cooling Chamber Cooling Hot Plate Controller 100 mm diameter max. 6 pcs 16 mm dia. (max. size) 10-6 hPA (pump included) bottom: 450 °C top: 200 °C 20 K/min (in vacuum) 20 K/min (in vacuum) Manual electrical Flow Meter with digital display Water cooled Water cooled 2604 Eurotherm PID 2Z-HVS-200 200 mm diameter max. 6 pcs 42 mm dia. (max. size) 10-6 hPA (pump included) bottom: 450 °C top: 200 °C 20 K/min (in vacuum) 20 K/min (in vacuum) Manual electrical...

Model 2Z-HVS OPTIONS HVS-FM-EL HVS-MFC TC Additional gas line with manually adjustable flow meter and digital display (max. 4) (additional flow meter on request) Additional gas line wtih Mass Flow controller (total: max 4 gas lines) Additional thermocouple to measure on device (plugged in chamber) for external measurement tool (max. 2) Closed loop water cooling system (stand alone) Model: 2Z-HVS-200: 6 Adapters with 42mm dia each Model: 2Z-HVS-100: 6 Adapters with 16mm dia each Other options and accessories on request Okt 2015 UniTemp GmbH Luitpoldstr. 6 85276 Pfaffenhofen/Ilm [email protected]...