High Vacuum Pump Turbo Molecular Pump [UTM Series] The UTM series is an all the blades type turbo molecular pump which carries a pivot bearing (lower side) and a magnetic bearing (upper side). Mechanical contact at the time of a high velocity revolution is reduced by adoption of the pivot bearing. Moreover, a low vibration and a high compression ratio are realized. Feat ures A p p lic a tio n s Main pumping systems for analysis equipment, research-anddevelopment equipment, and an experimental device. Fine dynamic balance rotor and highly efficient bearing by design of original blades realize a high velocity revolution, and inlet performance (high compression ratio) of low molecular weight gas, such as H2 and He. Main pumping systems for analysis equipment and evaluation equipment, which are vibration sensitive. A pivot bearing and fluoride oil (oil whose saturated vapor pressure is chemically stable and is low) are adopted, and environment without the infinite oil near zero is realized. Achievement of clean, ultrahigh vacuum is possible. Adoption of a fine dynamic balance rotor and a highly efficient bearing realizes low noise and low vibration. Main pumping system for low molecule gas, evacuation such as H2 and He. High Vacuum Pump Magnetic bearing was adopted as the upper part, pivot bearing was adopted as the lower part, and mechanical contact at the time of a high velocity revolution is eliminated. Thereby, bearing exchange and an oil change become unnecessary and realize extended life-span of bearing.

Turbo Molecular Pump [UTM Series] Dimensions Inlet Rotor blades Stator blades Single block rotor Magnetic bearing Protection device Inlet port Protection device START STOP RESET Pumping Speed POWER RUN FAILURE REMOTE L3 L2 (Air cooled) L1 (Water cooled) Cooling water inlet and outlet Rc 1/4 Cooling water inlet and outlet Pumping Speed

Cooling water inlet and outlet Pumping flow rate Pumping Speed Cooling water inlet and outlet Pumping flow rate Pumping Speed

ULVAC/Ji SOLUTIONS Turbo Molecular Pump [UTM Series]Specifications el Note: The values in the table are representative of actual measurement values and are not guaranteed. *1 These are values measured according to the JVIS005, or calculated values based on these measured values. *2 Without the Protecting metal net. *3 Range. *4 These are values measured under the condition of standard surface treatment, and measured with standard backing pump. When continuous long term operation near the maxmum inlet port pressure will be maintained, please consult the manufacturer (JVIS005 standard item9). *5...