Sroll Type Dry Vaccum Pumps DIS Series
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Catalog excerpts

■ Vacuum Pump ULVAC KIKO, Inc. Applications Analytical equipment. Gas recovery system. Coating equipment. Back pump for TMP Helium leak detector. • Double wrap type scroll pump which consists of 1 orbiting and 2 fixed scrolls. • Operation from atmospheric pressure is possible. • High ultimate pressure level is attainable • Low vibration and low noise. • Maintenance cycle can be controlled by hour meter. Manufacturing process for semiconductor. Vacuum Pump 20 Specifications Corresponding voltage and Certificate VACUUM COMPONENTS Pumping speed curves

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