Components Division, ULVAC, Inc. Vacuum Pump (Sputter Ion Pump) Acter Pump PST Series (Ultra-High Vacuum Type Sputter Ion Pump) Vacuum Pump Sputter ion pump is one of the pumps used to generate ultra and extremely-high vacuum. This pump has a simple design with no moving parts to produce wear and vibration. These features make the sputter ion pump the preferred one for the use in accelerators and analysis equipment. ULVAC, Inc. has developed the ACTER series of sputter ion pumps. The ACTER pumps use optimized magnetic field and new ACTER elements to greatly improve the pumping characteristic in the ultra and extremely-high vacuum range and to improve its overall cost performance. As a result of these performance enhancements, the ACTER pumps have been accepted in the accelerator, electron microscope and other scientific field. an example of pumping characteristics An Example of Pumping Characteristics Pa -4 • Ultimate pressure in the 10-10 Pa order achieved with a test dome an example of pumping characteristics with ISO standards (CXII, AXII Series) complying Bakeout temperature: 250°C • Excellent pumping performance achieved with the inert gas enhanced Pa Bakeout time: 60hr 10 pumping model (type AXII) Type: PST-400AXll • Bakeout temperature: 250°C Highly efficient bake-out and reduction of magnetic field leakage with Bakeout time: 60hr exclusive heater and shield cover Type: PST-400AXll • High pumping speed in the ultra-high vacuum range 10 Time Delay (sec) • Longer maintenance-free time 12 7.5kv • Top-notch pumping characteristics in 5.5kv ultra and extremely-high vacuum Time Delay (sec) 10 range (discharging is kept down to 12 10 7.5kv the ultra-high vacuum range) 8 5.5kv -4 6 2 Time taken that the pressure decreases again, after 4 turning off the voltage applied to the anode and 0 4 quickly turning on the voltage in 10-9-10-80Pa range. 2 2 -8 Pressure ( x 10 Pa) * 10 to 15 minutes were usually taken. Time elapsing from the end of bakeout Time elapsing from the end of bakeout VACUUM COMPONENTS

Components Division, ULVAC, Inc. A<ter Pump PST-400CXII/PST-400AXII Magnetic Flux Density Leakage_I_PumpingSpeedCurve Q. E D CL E D D O Specifications Item *1 UFC is an ultra-high vacuum flange for metal gaskets complying with ULVAC standards. It meets JVIS (Japan Vacuum Industry Standards Association) and International standards (ISO) . *2 W=Width, D=Depth, H=Height

■ Vacuum Pump (Sputter Ion Pump) Components Division, ULVAC, Inc. ■ Vacuum Pump (Sputter Ion Pump) Components Division, ULVAC, Inc. Vacuum Pump A<ter Pump PST-200CXII/PST-200AXII Magnetic Flux Density Leakage Pumping Speed Curve *1 UFC is an ultra-high vacuum flange for metal gaskets complying with ULVAC standards. It meets JVIS (Japan Vacuum Industry Standards Association) and International standards (ISO) . *2 W=Width, D=Depth, H=Height

■ Vacuum Pump (Sputter Ion Pump) Components Division, ULVAC, Inc. Magnetic Flux Density Leakage Pumping Speed Curve 1 UFC is an ultra-high vacuum flange for metal gaskets complying with ULVAC standards. It meets JVIS (Japan Vacuum Industry Standards Association) and International standards (ISO) . 2 W=Width, D=Depth, H=Height

■ Vacuum Pump (Sputter Ion Pump) Components Division, ULVAC, Inc. ■ Vacuum Pump (Sputter Ion Pump) Components Division, ULVAC, Inc. Vacuum Pump A<ter Pump PST-050CU/PST-050AU Dimensions (unit: mm) Magnetic Flux Density Leakage Pumping Speed Curve 1 UFC is an ultra-high vacuum flange for metal gaskets complying with ULVAC standards. It meets JVIS (Japan Vacuum Industry Standards Association) and International standards (ISO) . 2 W=width, D=depth, H=Height

Components Division, ULVAC, Inc. A<ter Pump PST-030CU/PST-030AU Magnetic Flux Density Leakage Q. E D CL E D D O Specifications Item *1 UFC is an ultra-high vacuum flange for metal gaskets complying with ULVAC standards. It meets JVIS (Japan Vacuum Industry Standards Association) and International standards (ISO) . *2 W=Width, D=Depth, H=Height