Vacuum Pump (Oil Rotary Vacuum Pump) ULVAC KIKO, Inc. Applications GLD series features high performance, low vibration and noise and several functions such as gas ballast valve, oil-back-flow prevention mechanism, and large sized oil level gauge. This series equips multi-voltage motor and correspondent to international standard. • Chemical, science experiment, Analyzer and Laser system. • Backing pumps for the electronic microscope. • Semiconductor equipments, sputtering equipment, vacuum evaporation equipment. • Vacuum dryer, freeze dryer. *: Ultimate pressure is measured by Pirani gauge. (In case of macleod gauge, the rate is one digit smaller than this rate.) Corresponding voltage and Certificate ■ Pumping speed curves VACUUM COMPONENTS

Oil-Sealed Rotary Vacuum Pump GLD Series Features GLD series features high performance, low vibration and • Chemical science experiment, Analyzer and Laser system. noise and several functions such as gas ballast valve, oil- • Vacuum pumping system. back-flow prevention mechanism, and large sized oil • Back pump for SEM. level gauge. This series equips multi-voltage motor and • Semiconductor equipments, sputtering equipment, vacuum correspondent to international standard. evaporation equipment. • Vacuum dryer, freeze dryer. * : Ultimate pressure is measured by Pirani gauge. (In case of macleod...