Oil Rotary Vaccum Pump VD Series
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Vacuum Pump (Oil Rotary Vacuum Pump) Oil Rotary Vacuum Pump Components Division, ULVAC, Inc. Vacuum Pump VD series is a direct-drive low noise oil rotary vacuum pump. This pump is suitable for a wide range of applications such as evaporator, sputtering and vacuum packaging. Features • Optimization Design for Quiet Operation • Easy Maintenance Pump head can be removed without disconnecting the vacuum piping (except VD151, VD201). *See attached figure. Oil level gauge and drain valve accessible for easy oil exchange and daily inspection. • Forced Oil Circulation System Ensures Stable Pumping Speed below Atmospheric Pressure When equipped with the optional oil mist trap and oil return mechanism, the VD301, VD401 and VD601 can continuously run at all pressure ranges under atmospheric pressure. • Totally enclosed fan cooled 3 phase AC motor Multiple voltage motor is equipped on the VD151 and VD201. Either 200V class or multiple voltage type is selectable for the VD301 to VD901. All model are complied with high efficiency regulation (IE2/EPAct). Applications • Evaporation, sputtering, and ion plating • Analytical instrument and leak test system • Gas exchange, gas filling, and vacuum insulation • Vacuum drying, freeze drying, vacuum degassing, vacuum packing, vacuum chuck and vacuum molding, etc.

Components Division, ULVAC, Inc. Totally-enclosed fan-cooled Flange inducton motor 3 phase 0.55kW 4P Rubber legs Outlet G1 (PF 1) Gas ballast valve Rubber legs Totally-enclosed fan-cooled Flange inducton motor 3 phase 0.75kW 4P Oil mist trap (Option) Totally-enclosed fan-cooled Flange inducton motor 3 phase 1.5kW 4P Vacuum Pump

Vacuum Pump (Oil Rotary Vacuum Pump) Oil Rotary Vacuum Pump Outlet VG 40 equivalency Inlet VG 50 equivalency Vacuum Pump (678) For Oil mist trap TM 401 (848) For Oil mist trap TM-2 Oil mist trap (Option) Totally-enclosed fan-cooled Flange inducton motor 3phase 2.2kW 4P Components Division, ULVAC, Inc. Oil mist trap (Option) When a pump is removed (VD301-VD901) Motor Pump VACUUM COMPONENTS Totally-enclosed fan-cooled Flange inducton motor 3phase 3.7kW 4P

Components Division, ULVAC, Inc. Model *1 Measured with a Pirani gauge. (Approx. 6.7x10'2Pa when measured with a McLeod vacuum gauge.) *2 Increased safey explosion-resistant motor and pressure proof explosion-resistant flange motor are available as option except the VD151 and VD201. *3 Other oil types are available upon request.