High-Speed Spectroscopic Ellipsometre [UNECS Series]
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Film Thickness High-speed Spectroscopic Ellipsometer [UNECS Series] U N E C S s e r i e s i s a k i n d o f s p e c t r o s c o p i c ellipsometers to measure the refractive index and thickness o f t h e t h i n f i l m q u i ck l y a n d a c c u ra t e l y. I t a d o p t s a n u n i q u e m e a s u re m e n t m e t h o d , a n d re a l i z e s t h e c o m p a c t s i z e a n d h i g h - s p e e d m e a s u re m e nt. It has a strong products line, such as the portable type, t h e a u t o m a t i c s t a g e t y p e, a n d t h e b u i l t - i n type etc. Measurement for transparent or semi-transparent thin films thickness(D), reflective index(N) and extinction coefficient(K). (Oxide film, nitride film, photo-resist film, ITO film, etc.) Film Thickness High-speed Measurement : The snapshot measurement method is realized and the high-speed measurement is 20ms per point. Visible Spectral Range : The spectral wavelength range can be selected. The standard type is 530nm~750nm and the visible spectral type is 380nm~760nm. Compact Sensor Unit : The sensor unit is light-weighted and very compact. It consists of an optical element that does not have any rotating mechanism. In addition, there is no need for any periodic maintenance. Strong Product-line : There is a strong products line with the portable type, the manual/ automatic stage type, the built-in type and the large substrate type etc. 〈 UNECS-3000A 2D Color Map 〉 SiO2 film on φ300mm Wafer Measurement Time : 133sec/169poin

Compact Light-weighted Portable Type Features The weight of the measurement unit is only 2.2kg. It is easy to be carried for vacuum equipments site acceptance test and can measure large size samples by detaching its sample stage and putting it directly on samples. Configuration Measurement unit (including manual stage and Control box). Light source unit. Control PC (Laptop type) and operation manual (CD).

UNECS-1500A/2000A/3000A(Auto Mapping Stage) Automatic Stage Type with Mapping Function F e a t u re s 3 models are available for φ150, 200 and 300mm samples. Auto mapping R-θ stage and auto focus function make it possible to measure film thickness of entire sample surface and dispay film thickness distribution by color map. Specifications Model Wavelength Range Spot Size Film Thickness Repeatability Film Thickness Measurement Range 1nm~2μm Measurment Time Sample Stage Maximum Automatic Measurable Points Laptop PC including analysis software easurement unit. M ontrol unit. C ontrol PC...

ULVAC SOLUTIONS ^1 The semitransparent film is the upper bound in the measurement film thickness. ^2 When only the film thickness value is assumed to be a fitting parameter, and the SiO2 film (about 100 nm) on the Si substrate is measured. ^ 3 When SiO2 single-layer film on Si wafer is measured. ^ 4 Standard deviation (1 a) when measuring it continuousness ten times. > Standard sample (100nm SiO2/Si) > Operation manual (normal or clean paper) High density mapping for 2,000 points (for 1500A/2000A) 3D color map (for 1500A/2000A/3000A) Sample observation camera (for 1500A/2000A/3000A)...