*mydirectindustry

Catalogs
ULVAC GmbH
Dry Vacuum Pump LS Series

Dry Vacuum Pump LS Series

Product catalog summary

Overview: The LS Series Dry Vacuum Pumps are designed for high pumping speed and low power consumption, featuring ECO-SHOCK technology. They are suitable for various industrial applications, offering models with different specifications to meet specific needs.

Key Features:

High Pumping Speed: Efficient at near atmospheric pressure, significantly reducing pumping down time.
Low Power Consumption: The C Type model consumes 0.6kW or less at ultimate pressure, leading the industry in energy efficiency.
Low Noise: Built-in silencer reduces noise levels to 61dB(A) or less.
Low Running Cost: No shaft sealing gas required, with purge gas available for L Type.

Performance and Models:

The LS Series includes four models: LS120A, LS300A, LS600A, and LS1200A, with pumping speeds ranging from 120 to 1200 m³/h.
Two types are available for specific applications: C Type for clean processes and L Type for light processes.

Specifications:

Power Consumption: Varies by model and type, with C Type models being more energy-efficient.
Noise Levels: Range from 61 to 64 dB(A) depending on the model.
Cooling and Purge Gas: Cooling water flow rate and purge gas flow rate are specified for each model, with purge gas not available for C Type.

Applications:

C Type: Suitable for clean processes such as air and N2 sputtering, vapor deposition, and load lock rooms.
L Type: Designed for light processes like vacuum drying, freeze drying, and general industrial use.

Additional Information: The catalog includes detailed dimensions, port specifications, and accessory options. It is intended for international sales, with contact information for ULVAC offices worldwide.

Catalog excerpts

Dry Vacuum Pump UlA/^VC

Open the catalog to page 1

High pumping speed and Low power consumption High pumping speed High pumping speed at near atmospheric pressure, and pumping down time can be drastically reduced. Low power consumption ECO-SHOCK technology realizes low power consumption. (C Type) Power consumption at the ultimate pressure is the industry-leading 0.6kW or less.(LS120A-C) Low noise Built-in silencer achieves the noise level 61dB(A) or less. Low running-cost No shaft sealing gas. *Purge gas is available with L Type. Difference in pumping speed Influence on pumping down time Condition Chamber : 100L Piping : 2inches, 1m Target pressure...

Open the catalog to page 2

4 kinds of model Pumping speed120~1200m3/h Class *With mecanical booster pump Model is selectable with the optimum pumping speed according to the application. 2 types for specific application C Type : Clean process (LS***A-C) Feature : Low power consumption model (with built-in ECO-SHOCK) Applications : For clean process such as air and N2 Sputtering / Vapor deposition / Lamination / Load lock room / TMP backing pump etc. L Type : Light process (LS***A-L) Features : Light process model (with surface treatment and purge function) Applications : For light process such as steam and volatile liquid...

Open the catalog to page 3

Specifications Dimensions Pumping speed curve *1 At ultimate pressure (reference only) *2 Purge gas is not available with C Type. *3 Max.water vapor tolerance is a value when purge gas is used. *4 C type is not leakless. Power connector Signal connector Controller USA : ULVAC Technologies, Inc. GERMANY : ULVAC GmbH CHINA : ULVAC (SHANGHAI) Trading Co.,Ltd. TAIWAN : ULVAC TAIWAN, Inc. KOREA : ULVAC KOREA, Ltd. SINGAPORE : ULVAC SINGAPORE PTE LTD (Swagelok for 6.35 mm-diameter pipe) (L type only) Drain valve (Rc 3/8) (L type only) Outlet port:KF40 Overseas Sales in Japan TEL +81-467-89-2261 PHILIPPINES...

Open the catalog to page 4

Dry Vacuum Pump LS Series

Dry Vacuum Pump LS Series

Catalog excerpts

All ULVAC GmbH catalogs and technical brochures