Catalog excerpts
Dry Vacuum Pump UlA/^VC
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High pumping speed and Low power consumption High pumping speed High pumping speed at near atmospheric pressure, and pumping down time can be drastically reduced. Low power consumption ECO-SHOCK technology realizes low power consumption. (C Type) Power consumption at the ultimate pressure is the industry-leading 0.6kW or less.(LS120A-C) Low noise Built-in silencer achieves the noise level 61dB(A) or less. Low running-cost No shaft sealing gas. *Purge gas is available with L Type. Difference in pumping speed Influence on pumping down time Condition Chamber : 100L Piping : 2inches, 1m Target...
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4 kinds of model Pumping speed120~1200m3/h Class *With mecanical booster pump Model is selectable with the optimum pumping speed according to the application. 2 types for specific application C Type : Clean process (LS***A-C) Feature : Low power consumption model (with built-in ECO-SHOCK) Applications : For clean process such as air and N2 Sputtering / Vapor deposition / Lamination / Load lock room / TMP backing pump etc. L Type : Light process (LS***A-L) Features : Light process model (with surface treatment and purge function) Applications : For light process such as steam and volatile...
Open the catalog to page 3
Specifications Dimensions Pumping speed curve *1 At ultimate pressure (reference only) *2 Purge gas is not available with C Type. *3 Max.water vapor tolerance is a value when purge gas is used. *4 C type is not leakless. Power connector Signal connector Controller USA : ULVAC Technologies, Inc. GERMANY : ULVAC GmbH CHINA : ULVAC (SHANGHAI) Trading Co.,Ltd. TAIWAN : ULVAC TAIWAN, Inc. KOREA : ULVAC KOREA, Ltd. SINGAPORE : ULVAC SINGAPORE PTE LTD (Swagelok for 6.35 mm-diameter pipe) (L type only) Drain valve (Rc 3/8) (L type only) Outlet port:KF40 Overseas Sales in Japan TEL +81-467-89-2261...
Open the catalog to page 4All ULVAC GmbH catalogs and technical brochures
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