■ Vacuum Pump Components Division, ULVAC, Inc. ■ Vacuum Pump Components Division, ULVAC, Inc. Dry Vacuum Pump LR/HR/UR Series ULVAC, Inc.'s unique approach to utilize the generated heat from within the dry pump body allows the LR/HR/UR series to perform even in the most stringent processes. ULVAC, Inc. has focused the design efforts into maintaining an extremely uniform high temperature throughout all pump stages making this series pump optimal for CVD and Etch applications. ULVAC, Inc.'s ECO-SHOCK can be added to the LR/HR/UR pump for additional energy savings of up to 70% for any light processes including pumping air or nitrogen. Features • Low Temperature Pumps The LR Series pump is designed for either Load Lock or PVD processes. • ULVAC's Unique Aluminum Design Allows for Very Uniform Temperature Distribution Throughout the Pump Body. The HR Series pump is designed for CVD and Etch processes. •The ULVAC UR Series Pump is Designed for Applications That Require a Heated Pump, Heated Gas Lines, and/or Heated Exhaust Lines. • Excellent Helium Pumping Capability Canned motor for safety and ease of maintenance. • Power Failure Protection Pump withstands power interruptions of up to 500ms duration. • Superior Corrosion Resistance Internal components are specially treated providing a high degree of surface hardness and corrosion resistance. This in turn prevents wear and corrosion of internal pump parts when exposed to corrosive gasses. • Communication Function Pump data including warnings and alarms are able to be exported. Extensive pump control is available. • CE marking is Available CE marking is available upon request. • Pump is designed for CVD or Etching applications • Pump is designed for PVD, Evaporation, or Heat Treatment processes • Reduction of exhaust time for LL chamber (LR series) • Pump is designed to handle process gasses that generate powder by products such as Si Crystal growing furnaces • Backing pump for turbo-molecular pumps and mechanical booster pumps VACUUM COMPONEN

*Please specify voltage at the time of ordering. *0=with x =with out *LR pump designed for low operating temperature of the pump body. The HR is for *MBP of LR300, LR600, LR1200, and LR1800 can choose the existence of a high temperature pump body operation. While the UR series is for Ultra High pump surface treatment. body temperature. *The HR300, HR600 and HR1200 models should all be operated below 200Pa (2 Torr). *The LR3601-R/TR/TTR allows improved exhaust speed performance at a high pressure.

■ Vacuum Pump Components Division, ULVAC, Inc. Acceptable Table Vacuum Pump Note: The pump flange needs to be supported. ULSAAC VACUUM COMPONENTS

Dry Pump Operation Mode *Please specify Pump Operation Mode. *Pump Operation Mode 3 is not avilable in these models. Operation Mode Silencer (Option) Model