■ Vacuum Pump Components Division, ULVAC, Inc. ■ Vacuum Pump Components Division, ULVAC, Inc. Dry Vacuum Pump GR Series Based on many years of experience with the LR/HR series ULVAC, Inc. has introduced the GR series dry vacuum pump with a simple and clean design for general industrial applications. Features • Particularly useful for high load applications such as repeated pump down between atmospheric pressure and vacuum and continuous running in the high pressure range. • Useful for load/unload lock chambers which require high throughput. • A universal induction motor is used. An explosion proof motor is avaialble as an option. • For motor power. Specify voltage required when ordering. Either 200 VAC class or Multiple voltage motors are available. • Clean gas vacuum pumping such as air, inert gas • Load/unload lock chambers of various types of deposition equipment • General industrial applications such as vacuum dryer, vacuum gas exchange in vacuum heat insulation and gas charging, vacuum degassing, etc. VACUUM COMPONENTS

*1 Ultimate pressure is a value when nitrogen gas (shaft seal gas) is 5.0SLM. *2 Non condensing. *3 Value in pressure gauge adjusted by regulator. *4 Flow rate of nitrogen gas (shaft seal gas) is fixed 5.0SLM. Components Division, ULVAC, Inc. Motor Specify a motor from following table when ordering. (Common motor is used for the GR180) Selection table Model