Introduction
The document introduces the GR series dry vacuum pump by ULVAC, Inc., designed for general industrial applications. It highlights the simplicity and cleanliness of the design, building on the company's experience with the LR/HR series.

Features
The GR series is particularly useful for high load applications, such as repeated pump downs between atmospheric pressure and vacuum, and continuous operation in high-pressure ranges. It is suitable for load/unload lock chambers requiring high throughput. The pumps use a universal induction motor, with an explosion-proof option available. Voltage specifications must be provided when ordering, with options for 200 VAC class or multiple voltage motors.

Applications
The pumps are applicable in clean gas vacuum pumping (e.g., air, inert gas), load/unload lock chambers of deposition equipment, and general industrial applications like vacuum drying, vacuum gas exchange, and vacuum degassing.

Specifications
The document provides detailed specifications for models GR60A, GR90A, and GR180A, including:

• Max. pumping speed: Varies by model and frequency (50Hz/60Hz).
• Ultimate pressure: 5.0 Pa, 3.7 × 10^-2 Torr, 5.0 × 10^-2 mbar.
• Maximum inlet and exhaust pressures: Atmospheric pressure.
• Inlet and outlet specifications: VG50 or ISO63F, NW40.
• Weight: Ranges from 128 kg to 268 kg depending on the model.
• Temperature range: 10 to 30°C (50 to 86°F).

Motor Specifications
Each model has specific motor options with details on frequency, voltage, rated current, and wiring type. The GR180A model uses a common multiple voltage motor.

Additional Components
The document includes information on optional components like silencers and cooling water systems, with selection tables for materials, surface treatments, and applicable models.

Dimensions
Dimensions for each model are provided, detailing measurements for various parts of the pump.

Conclusion
The GR series dry vacuum pumps are versatile and efficient for a range of industrial applications, offering customizable motor options and robust specifications to meet diverse operational needs.