■ Vacuum Pump Components Division, ULVAC, Inc. ■ Vacuum Pump Components Division, ULVAC, Inc. Dry Vacuum Pump CR Series CR series is an air-cooled roots type dry vacuum pump. Stable operation and extended lifetime are possible because there is no oil inside of the pump head and no contact between rotor and cylinder. Applications • Air cooled for low running costs • No requiement for cooling water and nitrogen gas • Low power consumption, air tight and light weight are featured in this pump • Possible to pump down water vapor by use of gas ballast • Integrated silencer results in a compact design Clean gas vacuum pumping such as air, inert gas Water vapor pumping for vacuum dryer equipment (gas ballast is required) Vacuum equipment such as sputtering, evaporator, etc. VACUUM COMPONENTS

Components Division, ULVAC, Inc. Pumping Speed Curves Model *1 Ultimate pressure is a value without gas ballast gas. *2 Please specify phase and voltage when ordering. *3 The valve for gas ballasts is an option. *4 Maximum water vapor tolerance is a value when gas ballast is used. Make sure to use a gas ballast mechanism. Option for Gas Ballast Model 1 Adapter flange is required for the CR16A and CR30A because the exhaust port size of them is NW25. 2 It is impossible to connect it to ductwork in the facility. This is only for safe gases which can be discharged indoors without connecting to ductwork....