■ Vacuum Pump ULVAC KIKO, Inc. Applications Vacuum chucks, wafer and tip handling devices. Vacuum tweezers, medical appliances. Printing equipment. Automatic packing machines. Optical appliances. Diaphragm type pump creates vacuum by reciprocating movement of rubber diaphragms. Pump structure creates an Oil-free environment and maintenance easy. Various pumping speed and two/single stages are selectable depends on your required pressure and pumping volume. Corresponding voltage and Certificate Pumping speed curves

■ Vacuum Pump ULVAC KIKO, Inc. Features Applications Diaphragm type pump creates vacuum by reciprocating movement of rubber diaphragms. Pump structure creates an Oil-free environment and maintenance easy. Various pumping speed and two/single stages are selectable depends on your required pressure and pumping volume. Vacuum chucks, wafer and tip handling devices. Vacuum tweezers, medical appliances. Printing equipment. Automatic packing machines. Optical appliances. Semiconductor industry. * With built-in Unloader valve. Corresponding voltage and Certificate ULVAC SOLUTIONS