B Power Generator (RF, DC) Components Division, ULVAC, Inc. B Power Generator (RF, DC) Components Division, ULVAC, Inc. DC Power Generator DPG-30R The DPG-30R is 30kW DC power generator for sputtering application and designed with reliable parts and circuit. And a low arc energy circuit, which interrupts output immediately when arc is generated, is equipped as standard specification. This power generator can be used as a 30kW to 240kW power generator system by connecting with the dedicated controller. Features Applications • Increased Reliability • Flat panel display sputtering Designed with reliable parts and circuit. • Semiconductor sputtering • Equipped with Low Arc Energy Circuit • Industrial coating sputtering A low arc energy circuit, which interrupts output immediately when arc is generated, is equipped as standard specification. • Wide Range Power Output Control Possible to output up to 120kW and control up to 4 units of power generator (DPG-30R) at same time by a single controller (DPGMC120R). Possible to output up to 240kW and control up to 8 units of power generator (DPG-30R) at same time by a single controller (DPGMC240R). • No Cooling Water is Required Air-cooled. • Wide Range Input Power AC380 to 480V ±10%. • Operation Without Controller Possible to operate without the controller by using external control terminal in the case of 30kW or lower. UlA^VC VACUUM COMPONENTS

Components Division, ULVAC, Inc.