B Power Generator (RF, DC) Components Division, ULVAC, Inc. The DPG-10/DPG-20 are 10kW/20kW DC power generators for sputtering. They are made of reliable components and circuits. These highly reliable power generators have been optimized for plasma loads with a design that reflects our many years of knowledge that includes power generator applications. Features Applications Power Generator • Light-weight/space-saving Light-weight and space-saving design with excellent installation flexibility. • Selectable output voltage range We feature a lineup with 800V specification in addition to 1000V specification. • Extensive arc handling Extensive arc control methods familiar with plasma. • Requires no cooling water Forced air cooling, requires no cooling water. • Can be equipped with a high-speed arc shutoff circuit Achieves low arc energy as standard. Can also be equipped with a high-speed arc shutoff circuit as an option. • Can be equipped with a flexible parallel operation function DPG-10, DPG-20: With the optional parallel operation function, 10kW and 20kW can be combined to allow up to 12units to work together in parallel operation. (240kW max) • Flat panel display sputtering • Semiconductor sputtering • Touch panel sputtering • Industrial coating sputtering VACUUM COMPONENTS

Components Division, ULVAC, Inc. Ambient operating temperature 10°C-40°C (no condensation) Operating environment: Avoid direct sunlight, heat, dust, vibration, and without corrosive gas. *1 Option *2 800V specification units and 1000V specification units cannot be used together.