TruPlasma RF Serie 7000
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High resolution needs high power.

High power enables great impressions. Excelling on larges scales. TruPlasma RF Series 7000. TruPlasma RF Series 7000 is a family of high reliability, high output RF power supplies for plasma excitation. This series offers field proven technology with an extensive installed customer base of nearly 20 000 units. A track record, unmatched worldwide. An impedance matching network adapts the complex impedance of a plasma process to a standard 50 Ω resistive load. It is typically connected between an RF source and a plasma chamber. It allows for the optimum transfer of energy into the process....

Available Models Output Parameters Output Power Version 13.56 MHz Operating Frequency Load Impedance Max. Output Current (rms)1 Version 13.56 MHz Max. Output Voltage (rms)1 Version 13.56 MHz Nominal Power in Continuous Operation1 Input Parameters Cooling Specifications Cooling System 2 l/min, 3,5 l/min, 8 l/min, 8 l/min +10 °C to +35 °C operating +5 °C to +40 °C torage6 s +5 °C to +80 °C ransportation6 t max. 75 %6 operating 20 % – 80 %7 non-operating below dew point under all conditions 800 hPa – 1 013 hPa Version 3.39 MHz Mains Voltage (Standard) Environmental Specifications Ambient...

Cooling Specifications Cooling System 50 Ω, coaxial socket connection BNC 50 Ω, coaxial socket connection BNC Fiber optic cable length Min. Differential Pressure TruPlasma RF 7007 / 7010 / 7015 / 7020 22 l/min monitored internally 26 l/min monitored internally 46 l/min monitored internally 56 l/min monitored internally Cooling Water Temperature Max. Temperature Refer to dew point diagramm 4) Depending on inlet cooling water temperature. Regulated internally. Environmental Specifications Ambient Temperature +5 % to +85 %6 operating +5 % to +95 %7 non-operating below dew point under all...

Dimensions (W x H x D), without Connectors TruPlasma RF 7007 / 7010 / 7015 / 7020 Protection Class Generator System Components Matchboxes, Master oscillator incl. phase shifter and RF cables Typical transformation characteristics of a matchbox Tune Transformation Load Transformation

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