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TRUMPF Power electronics
TruPlasma RF Serie 7000

TruPlasma RF Serie 7000

Product catalog summary

Overview: The TruPlasma RF Series 7000 is a range of high-reliability RF power supplies designed for plasma excitation, offering power outputs from 7.5 kW to 50 kW at frequencies of 3.39 MHz or 13.56 MHz. These units are known for their robust performance and are widely used in applications such as CVD, etching, sputtering, and plasma surface treatment.

Key Benefits:

High reliability in demanding processes.
Stable performance under critical load conditions.
Easy integration with host systems.
Comprehensive solution reducing total cost of ownership.

Features:

Robust architecture with tube/solid-state hybrid design.
100% mismatch protection.
Multiple control interfaces including CW or pulse mode.
Proactive RF arc management and built-in matchbox remote control.

Technical Specifications:

Available models for 13.56 MHz: PFM 10000, PFM 20000, PFM 40000, PFM 50000.
Available models for 3.39 MHz: PFM 20000, PFM 40000.
Max output current and voltage vary by model and frequency.
Cooling system: Water, with specific pressure and flow requirements.
Environmental conditions: Operating temperature from +5°C to +40°C, storage from -25°C to +55°C.

Interfaces:

RF Output/Input: 50 Ω coaxial socket connection BNC.
Control interfaces include A/D, DeviceNet, RS 232, PROFIBUS, and fiber optic connections.

Dimensions and Weight:

Dimensions vary by model, with weights ranging from 550 kg to 1,200 kg.

Additional Components: The system includes matchboxes and master oscillators with phase shifters and RF cables for optimal performance.

Catalog excerpts

High resolution needs high power.

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High power enables great impressions. Excelling on larges scales. TruPlasma RF Series 7000. TruPlasma RF Series 7000 is a family of high reliability, high output RF power supplies for plasma excitation. This series offers field proven technology with an extensive installed customer base of nearly 20 000 units. A track record, unmatched worldwide. An impedance matching network adapts the complex impedance of a plasma process to a standard 50 Ω resistive load. It is typically connected between an RF source and a plasma chamber. It allows for the optimum transfer of energy into the process. TRUMPF...

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Available Models Output Parameters Output Power Version 13.56 MHz Operating Frequency Load Impedance Max. Output Current (rms)1 Version 13.56 MHz Max. Output Voltage (rms)1 Version 13.56 MHz Nominal Power in Continuous Operation1 Input Parameters Cooling Specifications Cooling System 2 l/min, 3,5 l/min, 8 l/min, 8 l/min +10 °C to +35 °C operating +5 °C to +40 °C torage6 s +5 °C to +80 °C ransportation6 t max. 75 %6 operating 20 % – 80 %7 non-operating below dew point under all conditions 800 hPa – 1 013 hPa Version 3.39 MHz Mains Voltage (Standard) Environmental Specifications Ambient Temperature...

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Cooling Specifications Cooling System 50 Ω, coaxial socket connection BNC 50 Ω, coaxial socket connection BNC Fiber optic cable length Min. Differential Pressure TruPlasma RF 7007 / 7010 / 7015 / 7020 22 l/min monitored internally 26 l/min monitored internally 46 l/min monitored internally 56 l/min monitored internally Cooling Water Temperature Max. Temperature Refer to dew point diagramm 4) Depending on inlet cooling water temperature. Regulated internally. Environmental Specifications Ambient Temperature +5 % to +85 %6 operating +5 % to +95 %7 non-operating below dew point under all conditions...

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Dimensions (W x H x D), without Connectors TruPlasma RF 7007 / 7010 / 7015 / 7020 Protection Class Generator System Components Matchboxes, Master oscillator incl. phase shifter and RF cables Typical transformation characteristics of a matchbox Tune Transformation Load Transformation

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© TRUMPF Hüttinger GmbH + Co. KG, 2013. All rights reserved. Subject to errors and technical changes. 1527482 - V06 TRUMPF Hüttinger GmbH + Co. KG Bötzinger Straße 80 · 79111 Freiburg · Phone +49 761 8971-0 Fax +49 761 8971-1150 · E-Mail [email protected] Homepage www.trumpf-huettinger.com

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All TRUMPF Power electronics catalogs and technical brochures

Archived catalogs

TruPlasma RF Series 1000 / 3000
4 Pages

*Prices are pre-tax. They exclude delivery charges and customs duties and do not include additional charges for installation or activation options. Prices are indicative only and may vary by country, with changes to the cost of raw materials and exchange rates.

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