TruPlasma Highpulse Series 4000

Product catalog summary

Overview: The TruPlasma Highpulse Series 4000 is a power supply system designed for High Power Impulse Magnetron Sputtering (HIPIMS), producing high-density plasmas for superior deposition results. It is ideal for both functional and decorative applications, offering droplet-free deposition and excellent adhesion.

Specifications: The system delivers pulses up to 8 megawatts with peak currents up to 4 kiloamperes and peak voltages up to 2 kilovolts. It maintains an average power within the kilowatt range, allowing compatibility with existing magnetrons. Standard models offer 10 kW and 20 kW average output power, with custom power options available.

Benefits: The system provides flexibility for laboratory and industrial processes, reduces film defects, and effectively utilizes cathode power capabilities. It also prevents negative effects of arcs on both the cathode and coating.

Features: Key features include active arc suppression, adjustable pulse duration and frequency, real-time monitoring and control, and optional cable length compensation. The system supports a wide range of TruPlasma HIPIMS power forces.

Output Parameters: The output peak power ranges from 1 MW to 8 MW, with an efficiency of 90% to 92%. The operation duty cycle is 100%, and the system supports pulse frequencies up to 500 Hz with pulse durations under 200 μs.

Environmental and Cooling Specifications: The system operates within ambient temperatures of +5 °C to +35 °C and can be stored between -25 °C and +55 °C. It uses forced air cooling with a maximum inlet air temperature of +35 °C.

Interfaces and Dimensions: The system includes analog/digital interfaces, RS 232/RS 485, and optional PROFIBUS connections. The DC unit measures 483 mm x 632 mm x 675 mm and weighs 75 kg, while the pulse unit measures 483 mm x 635 mm x 676 mm and weighs 50 kg.

Catalog excerpts

TruPlasma Highpulse Series 4000 Generate high density plasmas for superior deposition results.

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Formed in microseconds – lasting for years: S p o t l e s s h a r d c o a t i n g s a c c o m p l i s h e d b y T R U M P F H ü t t i n g e r p o w e r. Droplet-free deposition and adhesion. TruPlasma Highpulse Series 4000. The TruPlasma Highpulse Series 4000 power supplies are specifically designed for High Power Impulse Magnetron Sputtering. Pulses of up to 8 megawatts produce extremely dense metal plasma. High ion fluxes and high ion-to-neutral ratios yield films with superior mechanical characteristics. Hard, homogeneous and smooth, these coatings are ideal for functional and decorative applications....

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TruPlasma Highpulse Series 4000 Pulse Unit Output Parameters Output Peak Power Output Average Power Output Peak Voltage Output Peak Current Input Parameters Regulation Modes Line Voltage Line Frequency Operation Duty Cycle Regulation Line ±10 % Load 10 % – 90 % Output Polarity 1) Depending on cathode max. average power. 2) Depending on model. Pulsed Operation Parameters Pulse Frequency Pulse Duration Output Voltage Average Power Peak Power Period 1/freq. Pulse length Output Voltage

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TruPlasma Highpulse Series 4000

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TruPlasma Highpulse Series 4000 Cooling Specifications Cooling System Forced Air Cooling / Fan Control Environmental Specifications Ambient Temperature 3) Special high altitude versions available upon request. Interfaces Analog / Digital Connection Type Pulse Unit 5) The numbers indicate minimum weight. Depending on model.

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© TRUMPF Hüttinger GmbH + Co. KG, 2013. All rights reserved. Subject to errors and technical changes. 1527481 - V08 TRUMPF Hüttinger GmbH + Co. KG Bötzinger Straße 80 · 79111 Freiburg · Phone +49 761 8971-0 Fax +49 761 8971-1150 · E-Mail [email protected] Homepage www.trumpf-huettinger.com

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