RF Generators TruPlasma RF Series 3000
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RF technology without compromises TRUMPF Hiittinger generating confidence

Start your TRUMPF Huttinger presents the revolutionary new generator generation: With previously unheard-of energy efficiency and robustness, the TruPlasma RF Se- ries 3000 revolutionizes the production of semiconductor elements, microchips, so- lar cells and flat screens in addition to assuring outstanding process stability. Thanks to special converter technology, the TruPlasma RF Series 3000 achieves up to 80 % efficiency - which means energy losses are halved compared to the market standard. A wide range of interfaces such as the EtherCAT interface and TruControl software simplify...

Ensures stable processes - in any application. Thin film solar cells, microchips, flat screens - very different coating processes that require a high-frequency process power supply. Lead the pack with the generator TruPlasma RF Series 3000 of TRUMPF Huttinger! Full control in plasma-assisted thin film deposition Structuring 450 mm silicon wafers is also no problem with the TruPlasma RF Series 3000. Outstanding results, both in deposition and etch Energy losses are halved thanks to improved energy efficiency Stable process performance for ultimate Especially robust and durable Guaranteed...

The highest efficiency for your processes. The unique efficiency and stability of the TruPlasma RF Series 3000 is based on two complementary, highly modern characteristics: Class D technology, an energy-efficient power transformation me- thod, as well as the CombineLine coupler patented by TRUMPF Huttinger that ensures a particularly steady process power supply and prevents damage due to reflected output power Features & benefits 1,, , rr. . k Energy losses are halved, reducing operating costs 2 Patented CombineLine coupler ^ Stable, reliable process electricity supply

Guaranteed stability – the CombineLine coupler. A stable process power supply is essential for predictable and This used to be your daily routine in high-frequency technolo- economical production. Thanks to the CombineLine coupler gy: high energy costs due to low efficiency. Thanks to the patented by Trumpf Hüttinger, an interference-free process innovative class D technology, the TruPlasma RF Series 3000 power supply is possible for the first time since reflected offers tremendous savings potential. Rather than 60 % effec- output power no longer flows back into the sensitive power tiveness...

'jn-.-T-lK-!-. JMr^ - Mains swilch With the TruPlasma RF Series 3000, you are on the safe side in every way - and not only due to its unique robustness and energy efficiency. Numerous inter- faces and connections, including an in- terface for the highly modern EtherCAT communication bus system, make it fu- ture-proof and ensure stability. Maine input Compact and reliable: the TruPlasma RF 3012

Control in comfort – TruControl Power. Our user-friendly, multilingual Tru­ Control Power software offers you numerous possibilities for the operation, configu­ ation and diagnosis of the r TruPlasma RF Series 3000. As a graphical user interface running on a PC, l TruControl Power displays all re­evant actual values; the nominal values can be specified by you. Warnings and alarms can be displayed in table form and reset if needed. With TruControl Power, you can also update the software on your generator easily and securely. With the easy-to-use TruControl Power programming software, you can...

Technical data Output power Output parameters Reflected output power (VSWR ∞) Operating frequency Pulsed operation parameters Pulse frequency Duty cycle Min. pulse on time / off time Mains input parameters Mains voltage Mains frequency Power factor Overall efficiency (line to load) at 12 kW / 50 Ω Cooling specifications Cooling system Min. water flow rate Cooling water temperature The cooling water temperature must exceed the dew point Interfaces and connections Analog RS 232/485 Profibus DP Ethernet EtherCAT (optional) DeviceNet (optional) Fiber Optics Matchbox interface Clock...

Top-class process performance. Day after day for more than ninety years, we have considered how we can supply energy to your production processes even faster, safer and more sustainably. Our experience and expertise in the development of process power supply systems have made us a world-leading supplier in the field of plasma applications, induction heating and CO2 laser excitation. We have committed to the TRUMPF quality standard for the development and production of our products. We subject our processes, activities and results to con­ inuous control. For Trumpf Hüttinger, quality means...

Trumpf Hüttinger – regional roots, active worldwide. Trumpf Hüttinger has been part of the TRUMPF Group Social responsibility is important to us as a family run company. as one of four business areas since 1990 and employs around We therefore work with various social institutions in the region. 700 people. Trumpf Hüttinger is based in Freiburg in the Promoting young talent is also close to our heart: we maintain Breisgau and maintains sales and service branches in Europe, partnerships with several schools, universities and networks. Here we consistently pursue one objective: to pass our...

© TRUMPF Hüttinger GmbH + Co. KG, 2014. All rights reserved. Subject to errors and technical changes. 1875770 – V05 Trumpf Hüttinger GmbH + Co. KG Bötzinger Straße 80 · 79111 Freiburg · Germany Phone +49 761 8971-0 · Fax +49 761 8971-1150 E-Mail Info.Electronic@de.trumpf.com · Homepage www.trumpf-huettinger.com