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Ingenious arc management. Unlimited possibilities. TruPlasma MF Series 3000 / 7000. The manufacture of state-of-the-art flat panel displays and solar cells requires the deposition of extremely homogeneous and defect-free films. High output power and deposition rates are, on the other hand, required for sputtering processes to coat large areas such as architectural glass and films. TRUMPF TruPlasma MF Series 3000 / 7000 generators provide the reliable and economic solution for those processes. TruPlasma MF Series 3000 encompasses a range of medium-frequency generators for small and medium output...

Output Parameters Output Power Residual Energy Output Frequency Output Voltage Input Parameters Accuracy Power Mains Voltage Mains Frequency 1) 2 150 V – 4 200 V available for TruPlasma MF 3010 / 3020 at 15 A maximum output current. 2) Values correlate with the data rank in ”Output Power”. Power Factor

Output Parameters Output Power Output Frequency Output Voltage Residual Energy < 5 mJ/kW (DetectLine) < 100 mJ/kW (SensorLine) 1) Values correlate with the data rank in ”Output Power”. Input Parameters Accuracy Power Arc response with DetectLineM Cathode current Cathode voltage Mains Voltage Mains Frequency Power Factor

Output Parameters Output Power Output Frequency Residual Energy Output Voltage 1) 570 V – 1 100 V according to tab settings, 750 V – 1 450 V available for TruPlasma MF 7100 / 7120 / 7150. 2) Values correlate with the data rank in ”Output Power”. Input Parameters Mains Voltage Accuracy Power Mains Frequency Power Factor

Cooling Specifications Dimensions (W x H x D), without Connectors Cooling System Water Flow Rate at 4 bar 1 8 l/min – 11 l/min (Series 3000) 45 l/min – 62 l/min (Series 7000 / 50 kHz) 21 l/min – 37 l/min (Series 7000 / 70 kHz) Max. Cooling Water Temperature Weight TruPlasma MF Series 3000 Environmental Specifications Ambient Temperature +10 °C bis +45 °C operating -20 °C bis +55 °C storage1 -20 °C bis +70 °C transport1 10 % – 90 % operating 30 % – 95 % storage 95 % transport2 800 hPa bis 1 013 hPa operating 800 hPa bis 1 013 hPa storage 800 hPa bis 1 013 hPa transport 1) No condensation or icing....

1. Hauptschalter 1. Hauptschalter mainmain switch switch interrupteur principal interrupteur principal 2. Netzanschluss 2. Netzanschluss mains connector mains connector alimentation alimentation 3. Kühlwasseranschluss G1/2G1/2 3. Kühlwasseranschluss (G3/8-Schlauch) (G3/8-Schlauch) A - Vorlauf A - Vorlauf B - Rücklauf B - Rücklauf colling water connections G1/2G1/2 colling water connections (G3/8 garden hose) (G3/8 garden hose) A - inlet inlet AB - outlet B - outlet raccord d'eau de refroidissement G1/2G1/2 raccord d'eau de refroidissement (G3/8 raccord de tuyau) (G3/8 raccord de tuyau) A - arrive...

© TRUMPF Hüttinger GmbH + Co. KG, 2013. All rights reserved. Subject to errors and technical changes. 1390394 - V06 Trumpf Hüttinger GmbH + Co. KG Bötzinger Straße 80 · 79111 Freiburg · Germany Phone +49 761 8971-0 · Fax +49 761 8971-1150 [email protected] · www.trumpf-huettinger.com