DC Generators TruPlasma DC Series 4000 (G2)
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Brilliant Reflections: TRUMPF Hüttinger makes optical coatings shine. Perfection in sight: Pulsed processes for spotless films. TruPlasma DC Series 4000 (G2). The TruPlasma DC Series 4000 (G2) power supplies are especially designed to serve reactive sputtering processes of difficult materials. Whether PVD or PECVD, the generators prove themselves in critical industrial plasma processes. These include solar cells manufacturing, production of semiconductors and hard coating applications. At output powers ranging from 20 to 200 kilowatts (stackable), the generators deliver their maximum power across a wide load impedance range. Fast DSP control allows thereby for stable processes and low arc-time related losses. TruPlasma DC Series 4000 (G2) combines the advantages of TRUMPF Hüttinger‘s excellent arc management and DC pulse technology. Thus reaching even less droplets and lower substrate damages in critical coating processes. Combined with an inherent very low stored energy, this considerably improves the overall process quality and production throughput. Extremely low arc energy Ultrafast digital control platform Adjustable reverse voltage Wide range of adjustable parameters: frequency and pulse parameters High sophisticated monitoring tools Full water cooling High lm quality and production yield Stable plasma and low arc-related time losses Simple adoption to different process requirements Allows for a wide range of applications with one device Fast and easy process optimization Compact size, easy system integration

© TRUMPF Hüttinger GmbH + Co. KG, 2015. All rights reserved. Subject to errors and technical changes. 1527487 - V04 Output Parameters Cooling Specifications Output Power Output Frequency Output Voltage Water Flow Output Current Max. Cooling Water Temperature Regulation Modes Power, voltage, current Environmental Specifications Operation Duty Cycle Ambient Temperature Reverse voltage Relative Humidity Regulation ± 0.5 % Accuracy Line ± 10 % Load 10 % – 90 % Repeatability ± 0.2 % Output Polarity Interfaces Analog / Digital Imax Detection Dynamic Voltage Change 2) Available upon request....