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DC Generators TruPlasma DC Series 3000 (G2)
DC Generators TruPlasma DC Series 3000 (G2)
The TruPlasma DC Series 3000 by TRUMPF Hüttinger offers advanced solutions for DC sputtering applications. These power supplies are designed for a wide range of industrial plasma processes, providing continuous DC power from 2 kW to 160 kW. They are particularly suited for applications requiring high reliability and performance, such as solar cell production and architectural glass coating.
Key Features
- CompensateLine arc management system reduces residual arc energy, enhancing layer quality and deposition rate.
- Compact, water-cooled design with high power density.
- Wide range of mains voltage and high output voltage.
- Easy integration with comprehensive communication interfaces.
Benefits
- Replaces expensive pulsed generators.
- Increases production yield and ensures high film quality.
- Stable, repeatable processes with reduced maintenance needs.
Technical Specifications
- Output Power: 2 kW to 120 kW (air-cooled), 20 kW to 300 kW (water-cooled).
- Output Voltage: 800 V (air-cooled), 1,000 V (water-cooled).
- Output Current: 5 A to 300 A (air-cooled), 50 A to 750 A (water-cooled).
- Regulation Modes: Power, voltage, current, SimReg.
- Efficiency: 87% - 92% (air-cooled), 92% (water-cooled).
- Power Factor: 0.92 - 0.94 (air-cooled), >0.96 (water-cooled).
Cooling and Environmental Specifications
- Air-cooled version uses forced air cooling with a max inlet air temperature of +35°C.
- Water-cooled version requires water pressure between 2 to 7 bar and a flow rate of 4 to 12 l/min.
- Operating ambient temperature ranges from +5°C to +45°C.
Interfaces and Protection
- Analog/Digital, RS 232/RS 485, PROFIbUS, DeviceNet, and EtherCAT interfaces available.
- Protection Class: IP 20 (air-cooled), IP 40 (water-cooled).
Models and Dimensions
- Various models available with different power outputs and dimensions, suitable for different industrial needs.
Catalog excerpts
TruPlasma DC Series 3000 Series 3000 (G2) Take a closer look to perfection.
Open the catalog to page 1
TRUMPF Hüttinger – driving innovations to higher levels. State-of-the-art solutions for DC sputtering. TruPlasma DC Series 3000. TruPlasma DC Series 3000 power supplies are designed to serve a broad range of DC sputtering applications. With a new generation of very compact, water-cooled units, TRUMPF Hüttinger now offers continuous DC power supplies that can replace pulsed generators in many sputtering applications. TruPlasma DC Series 3000 boasts TRUMPF Hüttinger‘s highly sophisticated arc management system CompensateLine. It allows for a dramatic reduction of the residual arc energy and ensures...
Open the catalog to page 2
TruPlasma DC Series 3000 air-cooled version TruPlasma DC Series 3000 (G2) water-cooled version Output Parameters Output Parameters Output Power Output Power Output Voltage Output Voltage Output Current Output Current Regulation Modes Power, voltage, current, SimReg Regulation Modes Power, voltage, current, SimReg Operation Duty Cycle Operation Duty Cycle Regulation Accuracy Line ± 10 % Load 10 % – 90 % Repeatability Regulation Accuracy Line ± 10 % Load 10 % – 90 % Repeatability Ignition (Capability) Ignition (Capability) Output Polarity Output Polarity Load Impedance Load Impedance 1) Available...
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Cooling Specifications Air-cooled Version Cooling System Forced Air Cooling / Fan Control Water-cooled Version Max. Water Pressure Water Flow Max. Cooling Water Temperature Ambient Temperature Environmental Specifications Ambient Temperature 4) Max. 2 000 m above sea level. Special high altitude versions available upon request. Interfaces Analog / Digital 25-pin Sub-D (air-cooled version) 15-pin Sub-D (water-cooled version) Protection Class Air-cooled Version Water-cooled Version Designation Declaration of conformity available upon request
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6) Master / Slave configuration. 7) Dimensions are given for each of the stacked units.
Open the catalog to page 5
Air-cooled version TruPlasma DC 3005 Water-cooled version TruPlasma DC 3020 (G2) 704 mm 610 mm
Open the catalog to page 7
© TRUMPF Hüttinger GmbH + Co. KG, 2015. All rights reserved. Subject to errors and technical changes. 1419231 - V09 TRUMPF Hüttinger GmbH + Co. KG Bötzinger Straße 80 · 79111 Freiburg · Phone +49 761 8971-0 Fax +49 761 8971-1150 · E-Mail [email protected] Homepage www.trumpf-huettinger.com
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