DC Generators TruPlasma Bipolar Series 4000 (G2)

Product catalog summary

Overview: The TruPlasma Bipolar Series 4000 (G2) power supplies are designed for high-performance applications in plasma-assisted film deposition, PECVD, and dual cathode sputtering processes. They are particularly suited for semiconductor manufacturing, architectural glass coating, solar cell production, and high-quality coatings.

Key Features:

Output power ranges from 10 kW to 60 kW with a compact design for easy integration.
Advanced digital arc management for optimal film quality and deposition rate.
Flexible output pulse configurations with independently adjustable duty cycles.
Pro-active arc management to minimize energy loss and process interruptions.

Benefits:

High film quality and production yield.
Stable plasma in reactive processes.
Adaptability to various process requirements.
High Mean Time Between Failures (MTBF).
Low cost of ownership and environmental protection.

Technical Specifications:

Output Parameters: Power (10 kW to 60 kW), Voltage (1000 V rms), Current (25 A to 150 A rms).
Regulation Modes: Power, Voltage, Current with high accuracy and repeatability.
Pulsed Operation: Frequencies from 20 kHz to 100 kHz, various bipolar and unipolar modes available.
Arc Detection: Fast detection time (<100 ns) with adjustable thresholds.
Cooling: Full water cooling with specific pressure and temperature requirements.
Environmental: Operating temperature from +5 °C to +45 °C, storage from -25 °C to +55 °C.
Interfaces: Multiple communication options including RS 232, RS 485, PROFIBUS, EtherCAT, and DeviceNet.

Dimensions and Weight: The series includes models with varying dimensions and weights, ranging from 50 kg to 160 kg, suitable for different installation needs.

Contact Information: TRUMPF Hüttinger GmbH + Co. KG, located in Freiburg, Germany, provides contact details for further inquiries.

Catalog excerpts

DC Generators TruPlasma Bipolar Series 4000 (G2)-1

TruPlasma Bipolar Series 4000 (G2) Generating waveforms.

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DC Generators TruPlasma Bipolar Series 4000 (G2)-2

Spotless images, bright perspectives: TRUMPF Hüttinger for impressive quality and performance. Flexible solutions. Extreme precision. High performance for reactive sputtering, sputtering of difficult materials and PECVD processes. The TruPlasma Bipolar Series 4000 (G2) power supplies are ideally suited for plasma-assisted film deposition PECVD and dual cathode sputtering processes, where reliability and performance are critical. Typical application areas are semiconductor manufacturing, architectural glass coating and solar cell production, high-quality hard and decorative coatings as well as...

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DC Generators TruPlasma Bipolar Series 4000 (G2)-3

TruPlasma Bipolar Series 4000 (G2) Output Parameters Output Power Output Voltage Regulation Modes Power, Voltage, Current Regulation Line ± 10 % Load 10 % – 100 % lmax Detection Adjustable current threshold [%] Automatic mode or [A] Manual mode Dynamic Voltage Change Adjustable voltage threshold [%] Dedicated to voltage drops > 100 V Usag Detection Adjustable voltage threshold [%] Dedicated to voltage drops < 100 V Adjustable voltage [V] and current [A] threshold Monitors output voltage and current Dynamic Cross Detection: Automatic Output Polarity Stacking units for higher power 1) Available...

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DC Generators TruPlasma Bipolar Series 4000 (G2)-4

TruPlasma Bipolar Series 4000 (G2) t MonoPulse mode – negative or positive I Bipolar mode with symmetrical outputs t DC mode – negative or positive Bipolar output with asymmetrical outputs and off time I Bipolar output with asymmetrical outputs Bipolar trapeze mode

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DC Generators TruPlasma Bipolar Series 4000 (G2)-5

TruPlasma Bipolar Series 4000 (G2) Cooling Specifications Max. Water Pressure Water Flow Max. Cooling Water Temp. Environmental Specifications Ambient Temperature Relative Humidity Interfaces Analog / Digital 4) Available upon request. Dimensions (W x H x D, mm) TruPlasma Bipolar 4010 (G2) Weight TruPlasma Bipolar Series 4000 (G2)

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DC Generators TruPlasma Bipolar Series 4000 (G2)-8

© TRUMPF Hüttinger GmbH + Co. KG, 2015. All rights reserved. Subject to errors and technical changes. 1797458 - V04 TRUMPF Hüttinger GmbH + Co. KG Bötzinger Straße 80 · 79111 Freiburg · Phone +49 761 8971-0 Fax +49 761 8971-1150 · E-Mail [email protected] Homepage www.trumpf-huettinger.com

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