DC Generators TruPlasma Bipolar Series 4000 (G2)
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TruPlasma Bipolar Series 4000 (G2) Generating waveforms.

Spotless images, bright perspectives: TRUMPF Hüttinger for impressive quality and performance. Flexible solutions. Extreme precision. High performance for reactive sputtering, sputtering of difficult materials and PECVD processes. The TruPlasma Bipolar Series 4000 (G2) power supplies are ideally suited for plasma-assisted film deposition PECVD and dual cathode sputtering processes, where reliability and performance are critical. Typical application areas are semiconductor manufacturing, architectural glass coating and solar cell production, high-quality hard and decorative coatings as well...

TruPlasma Bipolar Series 4000 (G2) Output Parameters Output Power Output Voltage Regulation Modes Power, Voltage, Current Regulation Line ± 10 % Load 10 % – 100 % lmax Detection Adjustable current threshold [%] Automatic mode or [A] Manual mode Dynamic Voltage Change Adjustable voltage threshold [%] Dedicated to voltage drops > 100 V Usag Detection Adjustable voltage threshold [%] Dedicated to voltage drops < 100 V Adjustable voltage [V] and current [A] threshold Monitors output voltage and current Dynamic Cross Detection: Automatic Output Polarity Stacking units for higher power 1)...

TruPlasma Bipolar Series 4000 (G2) t MonoPulse mode – negative or positive I Bipolar mode with symmetrical outputs t DC mode – negative or positive Bipolar output with asymmetrical outputs and off time I Bipolar output with asymmetrical outputs Bipolar trapeze mode

TruPlasma Bipolar Series 4000 (G2) Cooling Specifications Max. Water Pressure Water Flow Max. Cooling Water Temp. Environmental Specifications Ambient Temperature Relative Humidity Interfaces Analog / Digital 4) Available upon request. Dimensions (W x H x D, mm) TruPlasma Bipolar 4010 (G2) Weight TruPlasma Bipolar Series 4000 (G2)

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