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DC Generators TruPlasma Bias Series 3000/4000

DC Generators TruPlasma Bias Series 3000/4000

Product catalog summary

Overview: The TruPlasma Bias Series 3000 / 4000 is a range of bias power supplies designed for industrial plasma processes, particularly for sputtering, pre-treatment, and etching applications. These models offer two operating modes: high voltage (up to 1200 V) and low voltage (up to 300 V), making them versatile for various applications with similar voltage and current requirements.

Key Features:

Advanced arc management with DSP and FPGA signal evaluation for high accuracy and repeatability.
Digital feedback and adaptive control algorithms for real-time process monitoring and adjustment.
Output power range from 3 to 26 kW, with the ability to operate units in parallel for increased power or redundancy.
Standard data interfaces for easy integration.

Benefits:

Ensures consistent process conditions and reduces system complexity.
Improves output-to-defect ratio, even for thermally sensitive materials.
Neutralizes cable residual energy and supports smooth process operation.

Technical Specifications:

Output Power: 3 kW, 12 kW, 18 kW, 26 kW.
Output Voltage: HV up to 1200 V, LV up to 300 V.
Output Current: HV up to 22 A, LV up to 87 A.
Efficiency: 90% – 94%.
Operation Duty Cycle: 100%.
Regulation Accuracy: ±0.5%, Repeatability: ±0.2%.
Cooling: Forced air cooling with fan control.
Environmental Conditions: Operating temperature +5 °C to +35 °C, storage -25 °C to +55 °C, max humidity 80% non-condensing.

Additional Features for Series 4000:

Pulse Frequency: 0 kHz – 100 kHz.
Duty Cycle-on: 10% – 90%.
Arc Detection Time: < 500 ns.

Physical Specifications:

Dimensions: Series 3000 - 483 mm x 178 mm x 675 mm; Series 4000 - 483 mm x 267 mm x 675 mm.
Weight: Series 3000 - 40 kg; Series 4000 - 60 kg.

Contact Information: TRUMPF Hüttinger GmbH + Co. KG, Bötzinger Straße 80, 79111 Freiburg, Phone +49 761 8971-0, Email: [email protected], Website: www.trumpf-huettinger.com

Catalog excerpts

DC Generators TruPlasma Bias Series 3000/4000-1

TruPlasma Bias Series 3000 / 4000 Supporting great achievements.

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DC Generators TruPlasma Bias Series 3000/4000-2

A full range of bias power supplies for all sputtering processes. TruPlasma Bias Series 3000 / 4000. TruPlasma Bias Series 3000 / 4000 are designed for use as bias and pulsed bias supplies in industrial plasma processes. They feature two operating modes: high voltage mode (HV) with up to 1 200 volts (V) and low voltage mode (LV) with up to 300 V. While these models are intended for metallic sputtering, pre-treatment or etching, they can also be used for any application with similar voltage and current requirements. Built with DSP and FPGA signal evaluation, TruPlasma Bias Series 3000 / 4000 offer...

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DC Generators TruPlasma Bias Series 3000/4000-3

TruPlasma Bias Series 3000 TruPlasma Bias Series 40001 Output Parameters Output Power Output Voltage Output Current Voltage, current Operation Duty Cycle Accuracy Pause Time Regulation Line ±10 % Load 10 % – 90 % Var. Ux threshold: 0 V – 600 V Var. lx threshold: 10 % – 100 % of rated current dU – Dynamic Voltage Change Regulation Modes Output Polarity Input Parameters Line Voltage Line Frequency Additional Parameters for TruPlasma Bias Series 4000 Pulse Frequency Duty Cycle-on Maximum Peak Current TruPlasma Bias 4000 in some models is not available in US, JP, CH, DE, FR, GB, IT, LI. For details...

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DC Generators TruPlasma Bias Series 3000/4000-4

TruPlasma Bias Series 3000 / 4000 Cooling Specifications Cooling System Forced Air Cooling / Fan Control Environmental Specifications Ambient Temperature 2) Special high altitude versions available upon request. Interfaces Analog / Digital Connection Type 3) Available upon request. Dimensions (W x H x D) TruPlasma Bias Series 30004 TruPlasma Bias Series 40004 Weight TruPlasma Bias Series 30005 TruPlasma Bias Series 40005 4) The numbers indicate minimum dimensions. Height and depth depending on model. 5) The numbers indicate minimum weight. Depending on model.

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TruPlasma Bias Series 3000 / 4000

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© TRUMPF HÜTTINGER GmbH + Co. KG, 2013. All rights reserved. Subject to errors and technical changes. 1527467 - V06 TRUMPF Hüttinger GmbH + Co. KG Bötzinger Straße 80 · 79111 Freiburg · Phone +49 761 8971-0 Fax +49 761 8971-1150 · E-Mail [email protected] Homepage www.trumpf-huettinger.com

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*Prices are pre-tax. They exclude delivery charges and customs duties and do not include additional charges for installation or activation options. Prices are indicative only and may vary by country, with changes to the cost of raw materials and exchange rates.

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