DC Generators TruPlasma Bias Series 3000/4000
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TruPlasma Bias Series 3000 / 4000 Supporting great achievements.

A full range of bias power supplies for all sputtering processes. TruPlasma Bias Series 3000 / 4000. TruPlasma Bias Series 3000 / 4000 are designed for use as bias and pulsed bias supplies in industrial plasma processes. They feature two operating modes: high voltage mode (HV) with up to 1 200 volts (V) and low voltage mode (LV) with up to 300 V. While these models are intended for metallic sputtering, pre-treatment or etching, they can also be used for any application with similar voltage and current requirements. Built with DSP and FPGA signal evaluation, TruPlasma Bias Series 3000 / 4000...

TruPlasma Bias Series 3000 TruPlasma Bias Series 40001 Output Parameters Output Power Output Voltage Output Current Voltage, current Operation Duty Cycle Accuracy Pause Time Regulation Line ±10 % Load 10 % – 90 % Var. Ux threshold: 0 V – 600 V Var. lx threshold: 10 % – 100 % of rated current dU – Dynamic Voltage Change Regulation Modes Output Polarity Input Parameters Line Voltage Line Frequency Additional Parameters for TruPlasma Bias Series 4000 Pulse Frequency Duty Cycle-on Maximum Peak Current TruPlasma Bias 4000 in some models is not available in US, JP, CH, DE, FR, GB, IT, LI. For...

TruPlasma Bias Series 3000 / 4000 Cooling Specifications Cooling System Forced Air Cooling / Fan Control Environmental Specifications Ambient Temperature 2) Special high altitude versions available upon request. Interfaces Analog / Digital Connection Type 3) Available upon request. Dimensions (W x H x D) TruPlasma Bias Series 30004 TruPlasma Bias Series 40004 Weight TruPlasma Bias Series 30005 TruPlasma Bias Series 40005 4) The numbers indicate minimum dimensions. Height and depth depending on model. 5) The numbers indicate minimum weight. Depending on model.

TruPlasma Bias Series 3000 / 4000

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