GEMINI Multi-Chamber Stripper
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Catalog excerpts

Multi-Chamber Stripper The Gemini is the most compact, inexpensive and versatile system, which can handle 100-300mm wafers. This multi-chamber, high throughput stripping system is designed specifically for the demands of today's production fabs. By employing ICP, microwave and RF bias power as needed, difficult to remove layers of resist can be removed at low temperatures. As required by application, the Gemini can incorporate the SST-Lightning microwave source (which is both reliable and free from typical microwave tuning problems) or ICP High throughput Self tuning Small footprint Competitively priced

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