GEMINI Multi-Chamber Stripper

Product catalog summary

Overview: The Gemini is a compact, cost-effective, and versatile multi-chamber stripping system designed for handling 100-300mm wafers. It is tailored for modern production fabs, offering high throughput and the ability to remove difficult resist layers at low temperatures using ICP, microwave, and RF bias power.

Key Features:

Etch rates up to 6um/min
High throughput with low plasma damage
Self-tuning capabilities
Accommodates 100mm to 300mm wafers
Small footprint and competitive pricing

Technology Options: The Gemini can be equipped with the SST-Lightning microwave source, known for its reliability and absence of typical microwave tuning issues, or ICP technology, depending on application needs.

Support: Trion offers a fully equipped laboratory for process support both before and after purchase.

Contact Information: Trion Technology can be reached at (800)791-1504 or (727)461-1888, and more information is available at www.triontech.com.

Catalog excerpts

Multi-Chamber Stripper The Gemini is the most compact, inexpensive and versatile system, which can handle 100-300mm wafers. This multi-chamber, high throughput stripping system is designed specifically for the demands of today's production fabs. By employing ICP, microwave and RF bias power as needed, difficult to remove layers of resist can be removed at low temperatures. As required by application, the Gemini can incorporate the SST-Lightning microwave source (which is both reliable and free from typical microwave tuning problems) or ICP High throughput Self tuning Small footprint Competitively priced

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GEMINI Multi-Chamber Stripper

GEMINI Multi-Chamber Stripper

Catalog excerpts

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