APOLLO Stripper
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The cost of new stripping systems has escalated to unreasonable levels. Trion has solved this critical problem. The Apollo is a compact, inexpensive and versatile system, which can handle 100-300mm wafers. By employing either ICP or microwave and RF bias power as needed, difficult to remove layers of resist can be removed at low temperatures. As required by the application, this system can incorporate the SST- Lightning microwave source (which is both reliable and free from typical microwave tuning problems) or ICP high throughput • low plasma damage self tuning • 100mm to 300mm wafers small footprint • competitively priced The Apollo comes with full process support both prior to and subsequent to purchase. For a more detailed discussion please visit www.triontech.com. EXHAUST CONNECTION Trion Technology