TREK INC. ESD MEASUREMENT and EVALUATION ESD MEASUREMENT INSTRUMENTS ESD Measurement Control, Certified ESD Program Management With increasing industry concern about electrostatic discharge (ESD) and the damage it can cause in highly-sensitive electronics and other high-tech manufacturing, Trek offers products and expertise to assist with the measurement and control of ESD. Our measurement instruments deliver not only high accuracy but also high confidence. Trek charged-plate monitors help with ionizer setup, calibration and auditing processes. Our electrostatic monitors verify that air ionizers Model 158A Charged-Plate Monitor are working correctly, automatically. Trek hand-held electrostatic voltmeters and portable electrostatic voltmeters are easy-to-use and provide accurate surface voltage measurements throughout manufacturing processes, whether in semiconductor, hard disk drive, flat panel display or other highly sensitive environments. Model 347 Electrostatic Voltmeter For higher accuracy, Trek's Model 347 electrostatic voltmeter is designed for precision surface charge detection and measurement of semiconductor wafers, electronic circuitry and handling devices, in both on-line and off-line applications. Trek's surface resistance/resistivity meters deliver precise surface resistance measurements on virtually any conductive, dissipative or insulative material. These instruments enable quick and accurate checks on dissipative floors, work surfaces, table mats, and other static-controlled materials to insure that static charge is safely dissipated to Materials Research Trek instruments are utilized throughout the research community for charge measurements. For example, our high speed electrostatic voltmeters provide precise measurement of surface voltage, enabling the determination of work potential for various semiconductor materials and guiding design-of-experiment evaluations and other efforts in semiconductor physics. Smaller Devices Require Improved ESD Control Programs As device size decreases, the need to control electrostatic charge increases Will YOU be ready? Source of Data: The International Technology Roadmap for Semiconductors: 2010 (Factory Integration: Facilities Technology Requirements) Model 152-1 Resistance Meter with Surface/Volume CR Probe ITRS Facilities Technology Requirements Let Trek help you manage electrostatic charge: Trek sales personnel are certified by the ESDA with the designation of “ESD Certified Professional Program Manager” Trek Surface Resistivity Meters ¨ to be sure materials are safely dissipating charge to ground Trek Charged-Plate Monitors ¨ for ionizer setup, calibration and performance checkups Voltage as calculated using field limit and specified probe spacing Trek Electrostatic Voltmeters Maximum Allowable Electrostatic Field on Facility Surfaces (V/cm) Trek Infinitron DRAM ½ Pitch (nm) (contacted) ¨ to locate ESD problems and monitor processes in real time Ò ¨ innovative high impedance contacting voltmeter for site-specific monitoring

SERVING THE NEEDS FOR ESD MEASUREMENT & EVALUATION High Temperature 25 X 25mm Charged Plate DI [De-ionized Water] Probe Model 157 Charged Plate Monitor Model PD04002A Charged Plate Monitor 15 X 15cm Charged Plate Low Profile Charged Plate ¨ Measure and calibrate ionizer balance and discharge time ¨ Selectable plate size and capacitance to match ESD sensitive device characteristics · Determine what type and how many ionizers are needed for a specific location · Determine optimum location and placement of ionizers · Perform periodic verification of ionizer performance Charged-Plate Monitors (CPM)...

SERVING THE NEEDS FOR ESD MEASUREMENT & EVALUATION ¨ Measurements to Protect Sensitive Devices ¨ NEW Products from Trek The Trek Model 821 HH InfinitronÒ high impedance voltmeter performs accurate contacting (or non contacting) Model 821HH measurements from 0 to ±2 kV · Easily measures voltage levels of both conductive and insulative objects and surfaces with zero charge transfer · Highly stable, highly accurate measurement capability for ESD sensitive components, including semiconductors, LCDs and MR head sensors · Probe tips assume voltage level of the measured object surface, virtually ensuring...

Probe Selection Table for the Model 152-1 Probe Model* About Trek 152P-CR-1 Concentric Ring Probe 152P-2P Two-Point Resistance Probe Growth through Innovation Our scientifically based measurement expertise, coupled with our application knowledge, has enabled us to establish an enviable position in the markets we serve. In the decades that followed, Trek established itself as a designer and manufacturer of high quality instrumentation. Established Technical Expertise and Application Knowledge Founded on Technology TREK, INC. was established in 1968 to serve the needs of the electrophotography...