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646 Electrostatic Chuck (ESC) Supply

646 Electrostatic Chuck (ESC) Supply
2Pages

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646 Electrostatic Chuck (ESC) Supply - 1

Trek Model 646 Electrostatic Chuck Supply Trek’s Model 646 software-driven Electrostatic Chuck Supply offers an array of features that provide significant benefits while accommodating a variety of demanding applications. Model 646 incorporates Trek technology which has demonstrated increases in efficiency and throughput equal to three times that of other supplies. Virtual elimination of sticky wafer and wafer popping issues ensures better control over particle contamination. Given the versatility and performance of the Model 646, it can be used in multiple unique tools/processes, thus eliminating the need to specify a new supply for each unique tool/process in a facility. Key Specifications • Output Phasing: Voltage A (Reference Phase) 0 to ±3 kV Voltage B (Phase B = [-1] x Phase A) 0 to ±3 kV • Output Current Range: 0 to ±6.5 mA DC with a peak capability of 10 mA Typical Applications Include • Electrostatic-driven handling of materials • Semiconductor wafer processing • Non-mechanical transfer of flat panels or other processing materials sensitive to mechanical handling Features and Benefits • Supports both Coulombic and Johnsen-Rahbek ESC technologies • User configurable for custom clamp and declamp sequences and wave shapes • Electrostatic chuck profiles can be uploaded to the unit and stored internally via a user-friendly software interface • Reduces backside gas errors, increases throughput, and eliminates sticky/popping wafer issues • Lockable front panel control interface • Ability to control parameters such as over-current, wafer-present and wafer-clamped thresholds, clamp voltage, offset voltage and internal or external amplitude/offset control • Wafer detection includes no wafer, wafer present or wafer clamped status • Includes in-process-adjustable amplitude/offset and output-control versatility • Output can be controlled by back panel I/O, serial computer command or front panel controls • NIST-traceable Certificate of Calibration provided with each unit TREK, INC. • 190 Walnut Street • Lockport, NY 14094 • USA • 800-FOR TREK 716-438-7555 • 716-201-1804 (fax) • www.trekinc.com •

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646 Electrostatic Chuck (ESC) Supply - 2

Model 646 Specifications Outputs Simultaneous High-Voltage Outputs Clamped Wafer Detection Feature (Thresholds are set by the program) Two simultaneous high-voltage outputs (Output Phase A and Output Phase B) of equal magnitude and opposite in polarity relative to an offset voltage To indicate wafer clamping events, the capacitive currents generated by a low voltage sine wave, super-imposed on the Phase A and Phase B outputs, are monitored but can be disabled through the program. The superimposed waveform is used to indicate a no wafer, wafer present or wafer clamped status Output Phasing...

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646 Electrostatic Chuck (ESC) Supply 2Pages

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646 Electrostatic Chuck (ESC) Supply
2Pages