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640 Electrostatic Chuck (ESC) Optimizer


Catalog excerpts

640	Electrostatic Chuck (ESC) Optimizer - 1

Trek’s Model 640 Electrostatic Chuck Optimizer system is a diagnostic tool which enables evaluation and optimization of waveforms and voltages for electrostatic chucks/clamps in order to minimize de-clamp time, maximize clamp force, and achieve optimum wafer processing for ESC systems. Model 640 combines two amplifiers (for two-phase voltage combinations) and a waveform generator, which can be independently programmed and configured to investigate, research, and discover the perfect power supply and waveform recipe to efficiently drive an ESC application. An electrostatic voltmeter (ESVM) is included to monitor residual voltage from the clamping/de-clamping process. Key Specifications • Output Phasing: Voltage A (Reference Phase) 0 to ±2 kV Voltage B (Phase B = [-1] x Phase A) 0 to ±2 kV • Output Voltage Range: 0 to ±2 kV • Output Current Range: 0 to ±6.5 mA DC with a peak capability of 10 mA Typical Applications Include • Electrostatic-driven handling of materials • Semiconductor wafer processing • Non-mechanical transfer of flat panels or other processing materials sensitive to mechanical clipping Features and Benefits • Enables the creation of customized waveforms to be simple yet powerful, to generate the most complex waveforms that can be envisioned by the user • The product’s software accepts parameters via arbitrary data input, pre-programmed waveforms, or company-specific CSV files • Utility is enhanced via three individually programmed stages to build the waveform: (1) Clamp Signal Stage, (2) Processing Signal Stage (with options to “loop” the process cycle), and (3) De-clamp Stage • Test data is recorded and presented in numerical and graphical format with a color coded display • The graphs can also be used to troubleshoot mechanical and electrical problems within an ESC operation . NIST-traceable Certifícate of Calibration provided with each unit . Compliant TREK, INC. • 190 Walnut Street • Lockport, NY 14094 • USA • 800-FOR TREK 716-438-7555 • 716-201-1804 (fax) • •

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640	Electrostatic Chuck (ESC) Optimizer - 2

Model 640 Specifications □utputs Output Phasing 0 to ±2 kV DC or peak AC (4 kV p-p) Phase A Output Voltage Range Phase A Output Current Range Phase B Output Voltage Range Phase A Output Current Range 0 to ±5 mA DC or peak AC (10 mA p-p) 0 to ±2 kV DC or peak AC (4 kV p-p) 0 to ±5 mA DC or peak AC (10 mA p-p) Amplifier Performance [each phase] DC to greater than 1.2 kHz Large Signal Bandwidth (1% distortion) Small Signal Bandwidth (-3 dB) Slew Rate Settling Time DC Accuracy Offset Voltage Output Noise Drift with time Drift with Temperature DC to greater than 5 kHz Greater than 15 V/ps less...

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