Trek Model 1100TN Electrostatic Force Microscope (EFM) Electrostatic Voltage Distribution Measurement System The Trek Model 1100TN Electrostatic Force Microscope (EFM) enables voltage distribution measurements with a very high spatial resolution - better than 10 pm - which is well beyond the capability of typical electrostatic voltmeters. Trek's EFM can also measure voltage distribution across a much larger surface area as compared to a scanning probe microscope when operated under atmospheric conditions. Trek's EFM employs a feedback voltage to the detector which is equal to the measured voltage thus preventing arcing between the detector and the surface under test. • Measurement of antistatic bags, Si wafer • Electrophotography material testing • Photovoltaic materials evaluation • MEMS testing Key Specifications • Voltage Range: • Voltage Sensitivity: • Accuracy: • Incremental Step: • Detector Tip: • Measurement Area: ±1 kV Better than 100 mV Better than 0.5% of full scale 1 pm, minimum (detector) 5 pm X 5 pm 5mmX5mm Features and Benefits • Can be used in atmosphere conditions • Spatial resolution is better than 10 pm • Three measurement modes: - Static - Line Profile - 3D Mapping lOprn approx Measurement Sample(Toner)lmage TREK, INC. • 190 Walnut Street • Lockport, NY 14094 • USA • 800-FOR TREK 716-438-7555 • 716-201-1804 (fax) • www.trekinc.com • sales@t

Model 1100TN Specifications Performance Measurement Range 0 to ±1 kV DC Spatial Resolution (Reference to input voltage with combshaped electrode Separation between Detector Tip and Surface Under Test (Controlled with piezo stage in Z axis) Accuracy Voltage Sensitivity Sampling Speed Scanning Area X and Y Axis Z Axis Range 60% of signal strength for 10 pm width 70% of signal strength for 20 pm width Better than 0.5% of full scale Better than 100 mV 30 ms to 0.1 ms per data sample ±15 mm with 1 pm resolution 0 to 5 mm Z Axis Piezo Stage 0 to 80 pm with 1 pm accuracy Range Features Features (cont.)...