DIFFUSION BONDING

DIFFUSION BONDING “Diffusion Bonding” is a solid-state welding technique that bonds two solids at an atomic level. Diffusion bonding is usually implemented by applying high pressure, in conjunction with high temperature, without any liquid fusion or filler metal. = The bonded materials have the same physical and mechanical properties as the base materials. (physical strength, thermal resistivity, etc.) = The material under diffusion is able to reduce plastic deformation. It increases the flexibility of high-precision components. = Internal flow channels, micro and deep holes, etc. Diffusion bonding...

DIFFUSION BONDING Size= Max φ600 Material= Alumina (Al2O3), Aluminum Nitride, Quartz glass, Silicon, SiSiC (composite material), Molybdenum, Nickel -> The technique is still under the development phase, and the available materials are not limited to the list above. We are looking for any suggestions. Currently available results ・Deformation rete*1 = (in thickness) 0.00～0.20％ ・Helium leak testing*2 = ＜1.0x10-10～-11Pa・m3/s ＊ The values are either nominal values or typical values and are not guaranteed. ＊1 Sample size= 50 x 100 x 16t (mm) (bonded material of 2 plates of 50 x 100x 8t) ＊1 It depends...

Non-Contact Chuck Plate Specs - Layers = 3 - Size = φ96x9t (in total, 3mm thickness each) - Channels = 2~4mm (W) x 2~4 (D) - Holes = φ3~5mm - Material = quartz glass ➢ No steps would be left by machining after bonding Expected function Non-contact chucking (Flow chucking) = The channels on the three plates form two separate inner channels. By blowing air into one channel (yellow) and vacuuming through the other channel (red), wafers can be chucked in a floating state. The benefits are as below. ・ Avoiding pollution from the contact of wafers and the chuck ・ Enabling warped wafers to be

Cooling Channel Plate Specs - Layers = 2 - Size = φ390x11t (in total, 7mm and 4mm thickness each ) - Channels = 1.1(W) x 1.1(D) and 6.0(W)x3.5(D) -> 1.1x1.1 grooves turn into square holes. - Holes = φ5~7 mm - Material = quartz glass, SiSiC Thermocouples can be inserted from the side to measure almost whole areas. Expected function Cooling and measuring temperature with one plate = The two types of channels are intended to work as channels for cooling air or water and channels for inserting thermocouples. Thanks to bonding, the micro-deep channels could be precisely straight, which cannot be achieved...

Branching Channels Specs - Layers = 3 - Size = φ310x20t (in total,12mm, 6mm and 6mm thickness each ) - Channels = 5~10(W) x 2.0(D) - Holes = φ1.0~φ4.0 mm - Material = nickel Expected function Shower plate with branching channels = This plate structured only with nickel (=no liquid fusion,) and there is no concern about outgassing as well as deterioration of bonding material over time. Also, the bonding achieved high flexibility of design by enabling branching the channels. Cross Section View

Refractory Shower Head Specs - Layers = 2 - Size = φ96x7t (in total,3.5mm thickness each ) - Holes = φ1.0~φ5.0 mm - Bumps = φ5.0mm - Material = alumina, aluminum nitride Expected function Ceramics shower head that can be used in high temperature = There is no worries about metal pollution which should be avoided especially in semiconductor manufacturing factory. Also, Its thermal expansion realizes uniform gas injection. 〇Alumina Available in high temperature up to around 1500℃ as well as durable with plasma. 〇Aluminum nitride Superior in thermal conductivity and in durability with chemicals...

Inner Channel Plate Specs - Layers = 2 - Size = φ270x13t (in total,6.5mm thickness each ) - Channels = 7.0(W) x 4.0(D) - Holes = φ7.0 mm - Material = Molybdenum Expected function Inner channels that can supply cooling gases =Top Seiko can manufacture plates with inner channels for cooling devices or heat exchangers by diffusion bonding. Molybdenum can add refractory and low thermal expansion properties as its feat

DIFFUSION BONDING > Specs - Layers = 3 - Size = 0 285x9t (in total,3mm thickness each ) - Channels = 2.0~5.0(W) x 1.0~2.0(D) - Holes = 0 5.0 mm > Expected function Vacuum chuck having multifunctional channels Each channels has intended role: Red one and blue one are for vacuum chucking, and green one is for gases (e.g. cooling gas, anti-electricity gas, etc.) There are holes on the side of the plate which lead to each channel.

DIFFUSION BONDING is happy to test the feasibility of your machining needs. Please contact us with the following information. Details of your request - Functions (e.g. cooling, inserting of thermocouples, etc.) - Usage environment (e.g. max temperature, vacuum or atmosphere, cleanliness etc.) Demanded specification - accepted He leaking value - deformation rate (≒ dimensional accuracy) - surface condition - residue level in the inner structu