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TMC's Technical Background

TMC's Technical Background
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TMC's Technical Background

Product catalog summary
General Introduction
TMC specializes in precision working surfaces and vibration isolation systems, focusing on controlling environmental noise to optimize performance.
Sources of Vibration
Vibrations affecting payloads can originate from ground vibrations, acoustic noise, and direct force disturbances, impacting sensitive equipment.
Measuring Noise
Noise is categorized into periodic and random, measured using amplitude spectrum and amplitude spectral density, respectively, with RMS values characterizing noise levels.
Characterizing Isolators
Isolators' effectiveness is predicted by measuring ground noise and applying the system's transfer function, expressed in decibels.
An Idealized Isolator
Modeled as a harmonic oscillator, key parameters include natural resonant frequency and damping, providing isolation benefits at higher frequencies.
Pneumatic Isolators
These use air pressure to support loads, offering advantages like resonant frequency independence from payload mass and lightweight construction.
Types of Isolators
Includes Gimbal Piston, MaxDamp, and CSP systems, each with unique damping and stability features.
Placement and Number of Isolators
Typically, three or more isolators are used, with placement affecting performance and stability.
Safety Features
Includes tiebars, travel limits, and earthquake restraint brackets for enhanced safety.
Leveling Valves
Three height control valves optimize stability and minimize air consumption.
Gravitational Instability
Stability is influenced by pneumatic isolator stiffness and isolator separation.
Stability of Two-Chamber Isolators
Complex stability characteristics depend on air volumes and height control valves, with recommendations for improving stability.
High-Performance Table Tops
Constructed from various materials, each offering different benefits for specific applications.
Honeycomb Optical Tables
Lightweight yet rigid, suitable for high-precision applications, with enhanced compressional stiffness and thermal stability.
Optical Table Construction and Performance
Characterized by static and dynamic rigidity, with broadband damping providing effective vibration isolation.
Corner Compliance Testing
Challenges in measuring compliance due to edge effects, with proper support crucial for accurate measurements.
Active Vibration Isolation Systems
Complex systems offering capabilities beyond passive systems, driven by advancements in digital signal processing.
Servos & Terminology
Basic elements of active control systems, emphasizing the importance of loop transfer function and phase margin.
Active Vibration Cancellation
Systems control multiple degrees of freedom, balancing isolation and positioning accuracy.
Introduction to Active Vibration Isolation Systems
Designed to reduce vibrations using inertial sensors and actuators, limited by structural resonances and bandwidth.
Structural Resonances and Bandwidth Limitations
Resonances limit system bandwidth, with custom-engineered systems performing better than generic ones.
Types of Active Systems
Inertial feedback systems are popular but limited by bandwidth and sensor noise.
Inertial Feedback Systems
Limited by bandwidth, achieving maximum gain at around 2 Hz, with noise restricting performance.
Feedforward Techniques
Enhance performance when feedback is bandwidth-limited, using ground motion sensors for vibrational feedforward.
PZT-Based Systems
Use piezoelectric transducers for vibration isolation, effective in the 0.6-20 Hz range but require a rigid floor.
Conclusion
Active systems are crucial but face challenges like bandwidth limitations and structural resonances.
Hybrid Systems Overview
Combine elements of quiet piers and pendulum isolators, offering cost-effective solutions with specific application tuning.
Types of Applications
Vibration critical and settling time critical applications require different solutions, with active systems aiding in specific frequency ranges.
Settling Time Critical Applications
Require adequate isolation but suffer from insufficient settling times, crucial for maintaining instrument rigidity.
Inertial Feedback Challenges
Improve performance but have drawbacks like tilt to horizontal coupling and poor position settling times.
Feedforward Option
Offers a less expensive alternative, improving position stability and avoiding payload resonance issues.
Determining the Need for Active Systems
Depends on application criticality, with emphasis on identifying vibrational noise sources.
Technical Background
Discusses limitations of inertial feedback systems at low frequencies, recommending PZT-based isolators.
General Considerations
Recommendations for designing optimal systems to potentially eliminate the need for active systems.
Conclusions
Highlights challenges posed by Moore's Law, emphasizing collaboration and design method improvements to enhance system reliability and cost-effectiveness.
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Catalog excerpts

TMC's Technical Background -1

Directly Applied Noise Force FN Isolated Payload (M) Spring(k)Damper (b) Earth Ground Motion Xe Payload Motion Xp ω ( 222 Test Mass 1 +1 > Q ֏ T ɢɡ X > p Feedforward Input = > Pos.SumSumForceFilterFilter X > 2 ( ( e ω + > ω ω Q ω Isolated Payload Ground Motion Sensor X1++++ X2 Ks Seismometer InputOutput+- Sum G Earth H Borderline COM H Two-ChamberIsolators W UnstableStable Technical Manufacturing Corporation 978-532-6330 Օ 800-542-9725 (Toll Free) Fax: 978-531-8682 Օ [email protected] www.techmfg.com 97 size="-1">

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TMC's Technical Background -2

g these sources ofvibration can be done passively, with TMCs MaxDamp > Ү For over 30 years, TMC has specialized in providin g isolators must be desi g ned to addressthe central issue: control of environmental noise. g precision workin g surfaces and vibration isolation systemsfor precision measurement laboratories and industry. To provide optimal performance, both precision topsӔ and their supportin line of isolators or actively usin g feedback or feedforwardtechniques (active systems are discussed be g innin g onpa g e 112). Payload- g enerated noise sources are usually ofa well-known nature...

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TMC's Technical Background -3

in acceleration (see section 1.2.2 below). Amplitude spec-trums can also be expressed as velocity or position ampli- tudes as a function of frequency. Most spectrum analyzers use the Fast Fourier Transform, or FFT. An FFT analyzer finds the amplitude of each frequency in the input data and plots it. This includes the amplitudes and frequencies of any periodic noise sources. The amplitudes of periodic noise sources measured using an amplitude spectrum are independent of the length of the data record. > Hz , where [units]may be acceleration, velocity, or position. This normaliza-tion for the measurement...

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TMC's Technical Background -4

Since most locations have a combination of both random and periodic noise sources, it is often desirable to come up with a single number which characterizes noise levels. This is usually done by quoting an RMS (Root-Mean-Squared) noise level within a specified range of frequencies.Fortunately, this is easily done by integrating the powerspectral density or PSD over the frequency range ofinterest. The PSD is the square of the amplitude spectral density. This gives the following expression for the RMS motion between the frequencies f > 1 and f > 2 :This formula correctly calculates the RMS value...

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TMC's Technical Background -5

is just the fraction of the systems dampingto critical damping. We use Q rather than because T Q system to rest. It does this by producing a force on the payload proportional and opposite to its velocity relative to the earth:The presence of at = > , for Q s above about 2. There are several featureswhich characterize the transmissibility shown in Figure 3: ҕIn the region > ( X > e in both of these equations showsthat vibration of the earth is transmitted as a force to the payload by both the spring ( k ) and the damper ( b ). Ratherthan use the parameters ( M ), ( k ), and ( b ) to describe a...

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TMC's Technical Background -6

Figure 4a plots this function versus frequency. Unlike Figure 3, decreasing the > Q reduces the response of the payload at all frequencies, including the region >> Figure 5 shows a simplified pneumatic isolator. The isolator works by the pressure in the volume ( > . TMCs MaxDamp V ) acting on the area of a piston ( A ) to support the load against the force of gravity. A reinforced rolling rubber diaphragmforms a seal between the air tank and the piston. The pressure in the isolator is controlled by a height control valve which senses the height of the payload and inflates the isolator until the...

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TMC's Technical Background -7

load disk, which transfersits burden to the bottom of the piston well through the load pin. The load pin contacts the bottom of the well with a pivoting thrust bearing. As the payload moves sideways, the piston well pivots like a gimbal in the plane of the diaphragm. Thus a pendulum is formed, whose length is equal to the vertical distance from the roll in the diaphragm to the bottom of the load pin.TMCs CSP Figure 6 shows a cutaway view of TMCҒs Gimbal Piston > isolator. It uses two air chambers instead of one. Theseare connected by a small orifice. As the piston moves up and down, air is forced...

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TMC's Technical Background -8

by onboard disturbances, and improves both the leveling and settling times for the system. Leveling time is thetime for the valving system to bring the payload to the correct height and tilt. Settling time 0.5 inch travel range, and thisprovides enough flexibility for almost all applications. Some systems also provide leveling feet. If a floor is extremely uneven, piers for the isolators may be required. Some free- standing isolators or other types of supports (like rigid tripods) must be grouted to the floor if the floors surface has a poor surface quality. Quick-setting ғready-mix concretes...

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TMC's Technical Background -9

control triangle is formed by the three pointswhere the valves contact the payload. Like the loadtriangle, the system will have the greatest stability and best positioning accuracyif the COM is inside this triangle. Thevalves should be mounted and their armsӔ rotated such that this triangle has the largest possible area.7.Sometimes following the above rules results in a system with poor height and tilt positioning accuracy. In this case, an alternate choice for the master/slave combination(s) might be required. In addition to valve location, there are several differenttypes of valves which are...

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TMC's Technical Background -11

The condition for absolute stability is: And the formula for H < An > p W > p 2 VW > Tot.Tot. 2 X > p [12] [13] [14][15] and 2 + X > p AnVW W > ֮ H < r X > r r X > r isolators use a single air chamber, they are more stable, and the rule becomes:Note that the effective support point for TMCs GimbalPiston 2 Җ 2 + > absolute instability is: with the volume between being possiblyӔ or marginallyӔstable. The ratios H > An2VW > TopTop p X > and W > p X > p p isolators is approximately 7 in. below the top of the isolator. For lightly loaded isolators, these rules underestimate system stability. If your...

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