Stage-Base? 450 with STACIS® inside
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Moving stage and granite shown for reference VIBRATION CONTROL with STACIS® inside STACIS® inside Active Vibration and Motion Cancellation solation Systemsfor Increased Throughput Hard-mount active isolators Optional voice coil motors (VCM) inside for motion control and TMC continues to apply advancing tech- Nos. 5,660,255, U.S. Patent faster settling time (Patent Pending) Fast settling time 5,823,307, Other Patents Pending nology to develop new solutions to the in response to stage motion challenging demands that semiconductor tools place on their vibration isolation systems. Stage-Base™ 450 is the next genFeatures eration in active hard-mount piezoelectric • Incorporates patented STACIS® technology Marked vibration cancellation integrating voice coil • Active inertial vibration cancellation system ™ technology. Only TMC can offer•this unique Vibration cancellation starts below 1 Hz serial-type technology for advanced low stroke piezoelectric actuators, • Extended up to voice r frequency vibration cancellation with 60 microns • 6 active degrees-of-freedom lation System coil motors (VCM) for aggressive mov• Consists of two isolation systems in series ing-stage motion cancellation. for maximum vibration cancellation Stage Profile Payload Acceleration active control system incorporates TMC’s STACIS® technology to achieve extreme vibration cancellation using piezo-electric actuators and a stiff suspension in a serial-type architecture. This results in floor vibration isolation starting at 0.6Hz unmatched in the industry with significantly cies and unprecedented levels of high frequency The STACIS® iX LaserTable-Base combines New DC 2020 high speed digital controller less initial deflection in response to stage these two technologies, air and STACIS®, into isolation due to the combined effect of two with PC-Based GUI via USB forces. With the addition of VCM with one integrated cancellation system. The result isolation systems in series. is vibration cancellation at very low frequen(continued on back side) feed-forward control for Transmissibility * 1000% 10 even faster settling time to Transmissibility* 1000% 10 further increase throughVertical Horizontal put, the result is the most 0 1 advanced Active Vibration and Motion Cancellation system for moving stage 90% 0.1 90% 0.1 applications. • Employs high-force, extended stroke piezoelectric actuators • Position repeatability of payload to within microns • Frame-mountable design • active degrees-of-freedom 6 • Optional feedforward and/or feedback with VCM • Active vibration isolation starting at 0.6Hz • Fast settling time in response to stage motion • soft air suspension No • High speed digital controller with PC-Based Graphical User Interface (GUI) via USB 2.0 • Simple, robust, and cost-effective Isolation Amplification efficient vibration cancellation, just as critical, they require that payload motion * ime to settle payload acceleration from 0.8m/s2 to 0.01m/s2 in response T • Incorporates patented MaxDamp® stage with 300N Force to moving Stage-Base 450 is specifically designed to be Air Isolators • Simple, robust, the primary vibration cancellation system and cost-effective induced by the stage settle very quickly to • Installs easily, for advanced semiconductor tools which minimal tuning required • Incorporates unique • Optional shelves maximize tool throughput. Building on the incorporate high-precision motorized X-Y for mounting equipment under the table STACIS® iX Stage-Base, this next generation STACIS® technology stages. While such tools require•extremely DC-2000 Digital Controller Includes TMC’s Transmissibility = Acceleration Transmitted Acceleration Input Frame Mountable * 4,000 lb (1,800 kg) capacity LaserTable-Base with MaxDamp® Isolation System. Frequency, floor Payload of 2,000 lbs (907 kg), tested with simulatedHz vibration at VC-C (500 micro-inches per second, 12.5 microns per second). with1540 lb. (700 Kg) * Testedwith simulated floor payload vibration at VC-C (500 micro-inches per second, 12.5 microns per second). 78-532-6330 • 800-542-9725 (Toll Free) • Fax: 978-531-8682 • sales@techmfg.com • www.techmfg.com Stage-Base™ 450, January 2015