STACIS® iX SEM-Base? Active Piezoelectric Vibration Cancellation Floor Platform for Scanning Electron Microscopes
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U.S. Patent Nos. 5,660,255, 5,823,307, Other Patents Pending Technical Manufacturing Corporation Active Piezoelectric Vibration Cancellation Floor Platform for Scanning Electron Microscopes U.S. Patent Nos. 5,660,255, STACIS iX VIBRATION CONTROL 5,823,307, Other Patents Pending Active Piezoelectric Vibration Cancellation Floor Platform iX for Scanning Electron Microscopes ™ SEM-Base Isolation Systems Precision Vibration Features Marked Piezoelectric • Incorporates patented STACIS technology Active ™ • Active inertial vibration cancellation system ™ Vibration Cancellation Floor Platform below 1 Hz • Vibration cancellation starts for Scanning Electron Microscopes • Extended stroke piezoelectric actuators, ® U.S. Patent Nos. 5,660,255, 5,823,307, Other Patents Pending Air Technical Manufacturing Corporation cellation SystemSEM-Base™ active STACIS® iX up to 60 microns 6technology but has a much smaller active degrees-of-freedom Features Consists of two isolation systems in with ® vibration cancellation®floor platform footprint and installs easily series • ncorporates I for maximum vibration cancellation Transmissibility * STACIS technology Features system is designed for use with scanminimal tuning. • ctive inertial vibration cancellation system A • Incorporates10 patented MaxDamp® 1000% • Incorporates ning electron microscopes (SEMs). ™ Air Isolators • 35.5 in. x 44.5 in. x 6.5 in., fits most With vibration cancellation starting SEMs are among the most vibration • Active inertia • Simple, robust, and cost-effective Vertical commercial SEMs below 1 Hz, SEM-Base features Horizontal sensitive tools made, and these • Installs easily, minimal tuning required • L • Active Piezoelectric Vibration Cancellation Floor Platform oad capacity: 900 - 2,500 lb. extended Transmissibility *stroke piezoelectric actuators Featurescancellation starts below 1 Hz 35.5 x 44.5 x precision instruments typically incor­ Microscopes mounting equipment commercial S for Scanning Electron • Optional shelves for • ibration V and damped, 1000% 10 under the table powder-coated steel plates • Incorporates patented STACIS® technology porate an internal vibration isolation 1 • active degrees-of-freedom 6 • Load capacity that sandwich four isolators and • Includes TMC’s DC-2000 Digital Controller system. SEM-Base is compatible TMC’s DC 2000 digital controller. The system is only 6.5 in. tall, measures 35.5 in. x 44.5 in., weighs approximately 650 pounds, can support 900 to 2,500 0.1 pounds, and has no soft air suspension. Vertical Horizontal 1 SEM-Base is a compact, cost-effective alternative to our 65 Series STACIS® 2100 Floor Platform. It incor­ orates STACIS p • Active inertial vibration cancellation system • nstalls easily, I minimal or no tuning required • 35.5 x 44.5 x 5.5 inches, fits most commercial SEMs all internal tool • Compatible with vibration isolation systems • Load capacity: 900 - 2,500 90% lb. • o soft air suspension N • Vibration cancellation starts below 1 Hz Vertical 10 Horizontal Vertical * 2,1501lb. (980 kg) payload with 1 simulated floor vibration at VC-C (500 micro-inches per second, 12.5 microns per second) • Simple, robus isolation patented • Incorporates systems STACIS® technology • Optional cast no lifting requ • No inertial suspension • Active soft airvibration cancellation system • 35.5 in. Optional casters allow easy portability, (902 capacity: 900 - 2,500 lb. • Load mm) no lifting required • Vibration cancellation starts below 1 Hz for installation • Ask about our SEM-Lift™ System • Extended stroke piezoelectric actuators, up to 60 microns 44.5 in. (1130 • 6 active degrees-of-freedom mm) • Extended stro up to 60 micr • Simple, x 5.5 inches, fits most • 35.5 x 44.5 robust, and cost-effective commercial SEMs 1000% simulated floor vibration at VC-C (500 micro-inches per second, 1000% 12.5 microns per second) 99% Acceleration Transmitted Transmissibility = Acceleration Transmitted Transmissibility Acceleration Input Acceleration Input • Installs easily • imple, robust, and cost-effective S • Extended stroke piezoelectric actuators, • Optional casters allow easy portability, • Compatible w up to 60 microns isolation syst no lifting required • 6 active degrees-of-freedom ™ • No soft air su cies and unprecedented levels of high 90% frequency The STACIS® iX LaserTable-Base combines 0.1 .01 99% • sk about our SEM-Lift System A combined effect of two these two technologies, air and STACIS®, into isolation due to the 0.5 1.0 4.0 • Installs easily, minimal tuning required 10 40 for installation one integrated cancellation system. The result isolation systems in series. Frequency, Hz Transmissibility ** (continued on back side) • Compatible is vibration cancellation at very low frequenFeatures with all internal tool vibration TOP VIEW 2,150 lb. (980 kg) payload with Transmissibility latest elecs. y level y in able with all internal SEM vibration isolation systems. Acceleration Transmitted Acceleration Input Acceleration Transmitted Acceleration Input • Installs easily, minimal tuning required SIDE VIEW Technical Manufacturing Corporation • 978-532-6330 • 800-542-9725 (Toll Free) • Fax: 978-531-8682 • sales • Compatible with all internal tool vibration isolation systems • Simple, robust, and cost-effective * 4,000 lb (1,800 kg) capacity LaserTable-Base™ with MaxDamp® Isolation System. Frequency, Hz Payload of Corporation • 978-532-6330 • 800-542-9725 (Toll Technical Manufacturing2,000 lbs (907 kg), tested with simulated floor vibration at VC-C VIEW Free) • Fax: 978-531-8682 • sales@techmfg.com • www.techmfg.com TOP • Optional casters allow easy portability, * (500 micro-inches payload with 2,150 lb. (980 kg) per second, 12.5 microns per second). simulated floor vibration at VC-C (500 micro-inches per second, 12.5 microns per second) 800-542-9725 (Toll Free) • Fax: 978-531-8682 • sales@techmfg.com • Ask about our SEM-Lift™ System for installation sales@techmfg.com SIDE VIEW