Overview
The STACIS® 2100 is an advanced active piezoelectric vibration cancellation system designed to isolate precision equipment in semiconductor factories. It uses inertial vibration sensors and piezoelectric actuators to cancel floor vibrations in real-time, making it ideal for environments with sensitive instruments.

Specifications
- Active Degrees of Freedom: 6
- Active Bandwidth: 0.6 to 150 Hz
- Natural Frequency: Passive elastomer: 18 Hz; Effective active resonant frequency: 0.5 Hz
- Isolation at 1.0 Hz: 40% - 70%
- Isolation at 2.0 Hz and above: 90% or better
- Settling Time: 0.3 sec after a 10 lb step input
- Operating Load Range: 400 - 4,500 lb
- Isolator Size: 11.75 in. x 12.5 in. x 10.8 in.
- Operating Temperature: 50° to +90°F
- Power Requirements: 100, 120, 230 or 240 volts; 50/60 Hz; < 600 watts

Features & Benefits
- Incorporates patented STACIS® technology
- Active inertial vibration cancellation starting below 1 Hz
- Combines piezoelectric and air isolation systems for maximum cancellation
- Simple installation with minimal tuning required
- Compatible with various floor heights and sub-floor geometries
- Increases throughput, quality, and yield in manufacturing environments

Applications
The system is particularly effective in environments where seismic vibrations impact the performance of advanced lithography systems. It has been shown to significantly improve pattern quality in photolithography processes by reducing vibration levels.

Ordering Information
Available in various configurations with 3 or 4 mounts and different capacity levels, suitable for a range of applications and load requirements.

Conclusion
The STACIS® 2100 system is a robust solution for vibration-sensitive environments, offering significant improvements in equipment performance and pattern quality by effectively isolating vibrations.