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STACIS® 2100 Active Piezoelectric Vibration Cancellation System

STACIS® 2100 Active Piezoelectric Vibration Cancellation System
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STACIS® 2100 Active Piezoelectric Vibration Cancellation System - 1

VIBRATION CONTROL Active Piezoelectric Vibration Cancellation System ULTRA PRECISION TECHNOLOGIES WWW.techmfg.com • 978-532-6330 • 800-542-9725 (Toll Free) • Fax:978-531-8682 • sales@techmfg.com

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STACIS® 2100 Active Piezoelectric Vibration Cancellation System - 2

• Extended stroke piezoelectric actuators, up to 60 microns • 6 active degrees-of-freedom • Consists of two isolation systems in series for maximum vibration cancellation Features & Benefits• Incorporates patented MaxDamp® Air Isolators • ibration isolation starts at 0.6 Hz, V • Installs easily, robust control system • Simple, robust, and cost-effective with 40% to 70% isolation at 1 HzInstalls easily, minimal tuning required no on-site requires minimal or • • Provides greater than 90% isolation compensation • Optional shelves for mounting equipment at frequencies 2 Hz and higher, under the...

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STACIS® 2100 Active Piezoelectric Vibration Cancellation System - 3

VIBRATION CONTROL APPLICATION NOTE Impact of Vibration on Advanced Immersion Lithography (actual customer supplied data) The 45 nanometer line-width test patterns shown were produced with an advanced Immersion Lithography System manufactured by Amphibian Systems and installed at SEMATECH in Austin, Texas. Variation between the images is due to the effect of seismic vibration on the photolithography process. The images shown were obtained using a scanning electron microscope. Without STACIS®... With STACIS®... Best pattern obtained on either the elastomer or rigid version of original...

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