VIBRATION CONTROL VIBRATION CONTROL For Total Environmental Protection VIBRATION CONTROL SEM-Closure™ is an acoustic ™ enclosure designed specifically ™ for scanning electron microscopes For total environmental protection of with TMC’s (SEMs). Together scanning electron microscopes Protection For Total Environmental (SEMs) platform and SEM-Base™ floor Mag-NetX™ magnetic field cancelSEM-Closure™ is an acoustic enclosure designed specifically acoustic SEM-Closure™ is an for lation, SEM-Closure provides scanning electron microscopes (SEMs). enclosurewith TMC’s SEM-Base™ Together designed specificallya total environmental solution to ™ floor platform and Mag-NetX magnetic field cancellation, SEM-Closure™ for scanning electron microscopes protect sensitiveSEMs from provides a total environmental solution to protectsensitive with TMC’s all (SEMs). Together SEMs from outside interference. all outside interference. SEM-Base™ floor platform and SEM-Closure is designed Mag-NetX™ magnetic field cancelSEM-Closure is designed to accommodate SEM-Base, an active to SEM-Closure front view with 12" module on left side, accommodate SEM-Base, an active piezoelectric and Mag-NetX in a a piezoelectric vibration cancellation floorlation, SEM-Closure cancellation platform, vibration provides 24" module on right side. Modularity accommodates various floor and temperature-controlled sealed and temperature-controlled SEM configurations. total chamber – protecting the sealed platform, and Mag-NetX in aacousticalenvironmental solution to acoustical chamber – protecting the SEM fromsensitive SEMs from all protect and acoustic noise. SEM from vibration, magnetic field disturbances,vibration, magnetic field disturbances, and acoustic noise. outside interference. Integration of the three systems ensures proper fit and compatibility. Integration isolation system can be inside the enclosure itself. Also, SEM-Closure is compatibility. The vibrationof the three systems ensures proper fit anddesigned to The vibration isolation system can be inside the enclosure itself. Also, the SEM-Closure frame is designed to accommodateSEM-Closure front view with 12" module well as Mag-NetX Helmholtz coils as on left side, accommodate SEM-Base, an active the SEM-Closure frame cancellationto piezoelectric vibration is designed 24" module on right side. Modularity accommodates various the platform, and Mag-NetX in sealed and a second frame to house flooracoustic panels, eliminatingathe need fortemperature-controlled the coils. SEM-Closure provides multiple SEM configurations. accommodate Mag-NetX Helmholtz access points, a heat dissipation system, and vibration, magnetic field acoustical chamber – protecting the SEM fromprovisions for tool plumbing and cabling within the system. coils as well as the acoustic panels, The modular architecture of the eliminating the need for second disturbances, and acoustic noise. standard enclosure allowsaample space for many different commercial SEMs in various configurations. frame to house and compatibility. Integration of the three systems ensures proper fit the coils. SEM- The vibration isolation system can be inside Closure provides multiple to accommodate Mag-NetX Helmholtz coils as well as the enclosure itself. Also, the SEM-Closure frame is designed access Acoustic Transmissibility system, the acoustic panels, eliminating thepoints, a heat dissipation to house the coils. SEM-Closure provides multiple need for a second frame 0 and provisions for tool plumbing and access points, a heat dissipation system, and provisions for tool plumbing and cabling within the system. -10 cabling within the system. The modular architecture of the standard enclosure allows ample space for -20 many different commercial SEMs in various configurations. dB SEM-Closure SEM-Closure Optional quarter-panel door for quick and easy access Acoustic Transmissibility SEM-Closure™ Ordering Chart This measurement was taken during a non-optimized, factory floor installation without proper mounting of the SEM-Closure to the floor. Even better performance will be achieved -50 in lab floor and cleanroom floor installations. This measurement was taken during a non-optimized, factory floor installation without proper mounting of the SEM-Closure to the floor. Even better performance will be achieved in lab floor and cleanroom floor installations. Width Depth Height 50 NOTE: Change suffix -00 to -12 for 12 in. side module, or -24 for 24 in. side module. First two-digit suffix is for the left side, second two-digit is for the right side. Model shown is number 30-101-12-24. (continued on back side) www.techmfg.com second two-digit is for the right side. SEM-Closure™isOrdering Chart Model shown number 30-101-12-24. (continued on back side) NOTE: Change suffix -00 to -12 for 12 in. side Optionalor -24 for 24 in. side module. module, quarter-panel door for quick and easy access is for the left side, First two-digit suffix Width Depth Height

VIBRATION CONTROL Main door is 36" wide allowing full access to front of SEM. 24" side module also includes a door on front side. NEW options include: • multiple front door • direct vent • dditional cable a management features Several hinged doors allow easy access to any side of the SEM for sample preparation, adjustment of accessories and maintenance. Bi-fold doors on sides and rear help minimize clearance requirements. Optional quarter-panel door for quick and easy access. Model shown is number 30-202-12-24. Top panel includes easy-open, space-saving hatch door for access to top of SEM. Cam-Lock...