General Specifications
Mag-NetX™ is a magnetic field cancellation system designed to control vibrations and magnetic field fluctuations. It includes up to three orthogonal magnetic sensors, a Mag-NetX controller, and up to three orthogonal pairs of coils. The system actively cancels magnetic fields along the X, Y, and Z axes with a sensor noise level of less than 10 pT/√Hz at 1 Hz. It offers a bandwidth of DC to 1 KHz, extendable to 2 KHz, and a dynamic range of up to 100 µT, depending on the configuration.

Mag-NetX Controller
The controller features three channels for axis cancellation and operates in various modes, including automatic self-test, manual test/debug, true DC mode, offset-DC mode, and quasi-DC mode. It supports analog feedback with digitally controlled gain and digital feedback/feedforward for AC-line power frequency cancellation. The controller includes an LCD display, LED indicators, and interfaces such as USB and auxiliary analog inputs.

Performance and Features
The system provides continuous field cancellation and monitoring, with a typical field improvement of 100x. It offers a dynamic response time of 100 µs and accurate field measurement. The system is equipped with a graphical user interface for monitoring and analysis, and optional feedforward compensation for line frequency and harmonics. The modular design allows for easy assembly and installation, with options for column, floor, or wall mounting.

Applications
Mag-NetX™ is suitable for use with scanning and transmission electron microscopes, electron beam lithography systems, ion beam instruments, and other tools incorporating charged beams. It can be combined with TMC’s vibration isolation systems for enhanced control.

Ordering Information
To order, contact TMC to configure a system tailored to specific requirements and receive a quotation.