ICONTROLLER SPECIFICATIONS •Windows is a registered trademark of Microsoft Corporation in the U.S.A. -Ethernet is a registered trademark of Xerox Corp. in the U.S.A. •CC-link is a registered trademark of CC-link Partner Association. •DeviceNet is a registered trademark of ODVA. • Profibus is a registered trademark of Profibus User Organization. Large-size glass substrate handling robot Wafer handling robot Foup handling robot 8inch wafer cassette handling robot TOSHIBA MACHINE CO.,LTD. HEAD OFFICE Control Systems Sales Department, Control Systems Division 2068-3, Ooka, Numazu-shi, Shizuoka-ken 410-8510, Japan TOSHIBA MACHINE CO.,AMERICA. 755 Greenleaf Avenue, EIK Grove Village, IL 60007, U.S.A. Unit 15, The Weltech Centre, Ridgeway Welwyn Garden City, Herts AL7 2AA Before operating the industrial robot, read through and completely understand the instruction manuals. ■The contents included in this catalog are subject to change without prior notice to reflect improvements. TOSHIBA MACHINE SYSTEM ROBOTS TH/SR Series

Toshiba Machine's System Robots TH/SR Series HIGH SPEED, HIGH ACCURACY SCARA ROBOT LARGE SIZE SCARA ROBOT TEACH PENDANT Ample lineup to meet users requirements • Protective Bellows for Z-axis - ■ TH450~TH1050 Teach pendant maximum 15 meters • Tool flange for end-effector attachment- ■ TH180/TH250A/TH350A/TH450/TH550 ■MOTION PATTERN FOR STANDARD CYCLE TIME *1: 100mm for horizontal direction, 25mm for vertical direction, round-trip. *2: 300mm for horizontal direction, 25mm for vertical direction, round-trip. ■CLEAN ROOM (OPTION) # Applicable only around the hand area, in the downward airflow of...