Benefits for applying CFRP to semiconductor equipment are 1. Lightweight Reducing the weight of parts enables downsizing of motors, increasing energy efficiency, the movement speed of the equipment and minimized deflection of parts. 2. Stiffness It is possible to increase rigidity compared to aluminum. 3. Excellent Vibration damping Suppresses the resonance of the entire device and improves the stability of the device. 4. Low coefficient of thermal expansion Excellent dimensional stability
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