VSL - Smartline Vacuum Transducer Piezo / Pirani Absolute Pressure 1200 ... 1 x 10 -4 mbar Relative Pressure -1060 ... +340 mbar Overview VSL vacuum transducer n Two piezo diaphragm sensors to monitor chamber pump-down and vent-up; Pirani sensor measuring down to 1e-4 mbar controls low-pressure transfer between loadlock and process chamber minimizing particle events Differential pressure output for precisely triggering door-open function High accuracy, optimal resolution and excellent stability Stable readings due to optimized temperature compensation Measurements independent of gas type above 20 mbar Short response time of up to 40 ms Overview Smartline vacuum transducers n Digital RS485 interfaces plus 0-10 V output signal, EtherCAT or PROFINET, Bluetooth adapter SLKBT for wireless communication PROFINET transducers support MRP Exchangeable sensor heads with stored calibration data Large LCD display (exc. EtherCAT, PROFINET) Readjustment of zero and atmosphere by pushbutton or interface LEDs for device status and switch points Two independent, potentialfree relay switch points (exc. EtherCAT, PROFINET) Protection class up to IP54 0-10 V output signal can be scaled according to the required output characteristics. Exchange of existing vacuum gauges easily, independent of the manufacturer, without programming effort Intelligent sensors for simplified integration according to Industry 4.0 standards Metal sealed stainless steel sensor cell, suitable for UHV (He leackage rate <5e-10 mbar l / s) Expansion with 2 channel controller VD12 or 4 channel controller VD14 possible VacuGraphTM Windows software for visualisation, analysis and storage of measuring data

VSL - Smartline Vacuum Transducer Piezo / Pirani Absolute Pressure 1200 to 1 x 10 -4 mbar Relative Pressure -1060... +340 mbar Technical Data Measurement Principle Piezo-resistive / heat conduction Pirani (Pirani, depending on gas type) Measurement Range Absolute: 1200 - 1e-4 mbar (900 - 1e-4 Torr) Relative: -1060...+340 mbar (-795...+255 Torr), dep. on ambient pressure Absolute: 1200 - 40 mbar: 0.3 % f. s. 40 - 2e-3 mbar: 10 % f. r. Relative: 0.25 % f. spane Materials with Vac. Contact Stainless steel 1.4307, tungsten, nickel, glass, gold, silicon oxide Reaction Time Operating Temperature Storage...

VSL - Smartline Vacuum Transducer Piezo / Pirani Absolute Pressure 1200 to 1 x 10 -4 mbar Relative Pressure -1060... +340 mbar Model designations VSL53DL DN16 ISO-KF, 0-10 V and RS485, with LCD display VSL54DL DN16 CF-F, 0-10 V and RS485, with LCD display VSL53E VS´ 54E L DN16 ISO-KF, EtherCAT and RS485 DN16 CF-F, EtherCAT and RS485 VSL53PN DN16 ISO-KF, Profinet and RS485 VSL54PN DN16 CF-F, Profinet and RS485 Replacement sensor heads: B_VSL53, B_VSL54 SLCASE Smartline protective plastic case , SLN4 plug-in power supply, SLKUSB interface converter RS485-USB, VGR VacuGraph software lite version...