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Oil-Free LM Guide for Special Environments

Oil-Free LM Guide for Special Environments

Oil-Free LM Guide for Special Environments

Product catalog summary
Overview: The document introduces the Oil-Free LM Guide designed for special environments, particularly vacuum conditions up to 10-6 Pa, where traditional oil-based lubricants are unsuitable. It features a newly developed Dry Lubrication S-Compound Film, which offers low particle generation and low outgassing.
Specifications: The guide components include an end plate made of SUS304, balls of SUS440C coated with the Dry Lubrication S-Compound Film, and both the LM block and rail made from THK-EX50 martensitic stainless steel. The guide is suitable for high vacuum and high-temperature applications up to 150°C (instantaneously 200°C).
Material Properties: The Dry Lubrication S-Compound Film exhibits a low friction coefficient (0.02 to 0.05) and high wear resistance compared to other materials like molybdenum disulfide and DLC. It is effective in both atmospheric and vacuum environments.
Performance Advantages: The guide generates fewer particles than conventional vacuum grease lubricants, offers low friction, and has a longer service life. It is particularly beneficial in semiconductor and FPD manufacturing machines, exposure machines, and ion injection machines.
Accuracy and Precision: The guide's accuracy is classified into Precision (P), Super Precision (SP), and Ultra Precision (UP) grades. Dimensional tolerances and running parallelism values are provided for different model numbers.
Handling and Storage: The guide should not be disassembled or subjected to impacts. It should be stored in a clean, dry environment with controlled temperature and humidity. The product is packaged moisture-proof and should be unpacked immediately before use.
Applications: The guide is ideal for environments where chemical contamination is not allowed, and it can operate at high temperatures. It is used in industries requiring minimal outgassing and low particle generation.
Contact Information: The document provides contact details for THK offices worldwide, including locations in North America, Europe, Asia, and South America.
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Catalog excerpts

Oil-Free LM Guide for Special Environments-1

Oil-Free LM Guide for Special Environments Optimum for use under a vacuum environment (up to 106 Pa) where oil cannot be used Newly developed: Dry Lubrication S-Compound Film Low particle generation, low outgassing TOKYO. JAPAN

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Oil-Free LM Guide for Special Environments-2

Oil-Free LM Guide for Special Environments THK-EX50 (martensitic stainless steel) Structure of the Oil-Free LM Guide for Special Environments # Structural characteristics 1. Uses stainless steel All components are made of stainless steel for special environment. Special solvent Is used to de-grease this This achieves The product does not use any grease, but adopts a highly reliable Dry Lubrication S-Compound Film. # What is Dry Lubrication S-Compound Film Dry Lubrication S-Compound Film is a fully dry lubricant developed for use under atmospheric to high-vacuum environments. It has superior characteristics...

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Oil-Free LM Guide for Special Environments-3

The Oil-Free LM Guide for special environments exerts superbly low frlctional properties In atmospheric to vacuum -Dry Lubrication S-Compound Film (vacuum) -Dry Lubrication S-Compound Film (atmosphere) The Oil-Free LM Guide for special environments exerts a lower level of particle generation than conventional vacuum grease lubricants. Particle diameter (ium) ■ 0.1 or larger With vacuum grease (LM Guide) I Particle diameter (fjrn) ■ 0.1 or # Long Service Life The Oil-Free LM Guide for special environments has a longer service life than conventional dry lubrication. Contact surface pressure of...

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Oil-Free LM Guide for Special Environments-4

Accuracy Standard Accuracy of the Oil-Free LM Guide for special environments is classified into Precision (P), Super Precision (SP) and Ultra Precision (UP). Radial clearance of the Oil-Free LM Guide for special environments is defined with the values in the table below.

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Oil-Free LM Guide for Special Environments-5

Shoulder height of the mounting surface and the corner radius Normally, the mounting surface for the LM block and the LM rail has a datum plane on the side face in order to allow easy installation and highly accurate The corner of the mounting surface must be machined to have a recess, or machined to be smaller than the corner radius "r," to prevent interference with the chamfer of the LM block or the LM rail. Qlblerance in parallelism between 2 rails The following table shows the tolerance in parallelism (P) between 2 rails. Qlblerance in vertical level between 2 rails The following table shows...

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Oil-Free LM Guide for Special Environments-6

Model SR-MSV/W Dimensional table for models SR-MSV/W Note 1 : If you desire a product other than the model numbers indicated above, contact THK. Note 2: For durability of the Oil-Free LM Guide for special environments, contact THK. Example of model number coding Number of rails used With this model, a single-rail unit constitutes one set (i.e., the required number of sets when 2 rails are used in parallel is 2).

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Oil-Free LM Guide for Special Environments-7

Standard length and maximum length of the LM rail The following table shows the standard length and the maximum length of the LM rail of the Oil-Free LM Guide for special environments. If the overall rail length exceeds the maximum length, contact THK. For dimension G if you require a special length, we recommend using the dimensions in the table. If dimension G is longer, the respective part tends to become unstable after installation, which may negatively affect the accuracy. Standard length and maximum length of the LM rail Note 1 : If you desire a rail length larger than the maximum length,...

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Oil-Free LM Guide for Special Environments-8

EFÜ=¡ln£ Oil-Free LM Guide for Special Environments • Pulling out the LM block from the LM rail will cause balls to fall, or damage the Dry Lubrication S-Compound Film when reattaching the LM block. If it is necessary to remove the LM block from the LM rail, contact THK. • Do not disassemble the parts. Doing so may cause entrance of dust or a functional loss. • Tilting the LM block or the LM rail may cause it to fall by its own weight. • Do not drop or hit the LM Guide. Doing so may cause injury. It may also cause failure or breakage. Applying an impact to the product may cause a functional loss...

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*Prices are pre-tax. They exclude delivery charges and customs duties and do not include additional charges for installation or activation options. Prices are indicative only and may vary by country, with changes to the cost of raw materials and exchange rates.