Clean-Room Actuator Low dust generation structure High speed (maximum speed 2000[mm/s]) Compact size and high rigidity For details, visit THK at www.thk.com Product information is updated regularly on the THK website.

Structure Model CSKR is the clean-room actuator using the Caged Ball LM Guide Actuator Model SKR. End cover Top cover Slider Vacuum fittings Sealing sheet Side cover Intermediate flange Enlarged view Ball screw shaft Outer rail Inner block Caged Ball Structure of Clean-Room Actuator Model CSKR Features 1. Low dust generation structure With a unique covering mechanism using a sealing sheet, models CSKR20 and 26 have achieved the classification of clean-room level of ISO14644-1*1 class 3*2 (equivalent to FED209E class 1) and models CSKR33 and 46 have achieved the classification of clean-room level...

Particle Generation Test Measurement method Air flow intake: Flow rate 0.3 × 10-3 [m3/min] Acceleration/ deceleration speed Vacuum rate Operating load Testing environment: Inside a clean bench Acrylic cover Clean-Room Actuator CSKR Measurement devices Particle counter (KC-18 by Rion) Connection to the vacuum pump Flow speed: 0.25m/s Measured flow rate: 1 x 10-3 [m3] Flow speed of the measurement section Measurement time Air intake rate Sampling tube Connected to the particle counter Measurement results Evaluation result of model CSKR 50-hour continuous operation (maximum speed 2000[mm/s]) Particle...

Product Specifications Specifications Model no. Ball screw lead Effective stroke Note 1) Positioning repeatability Note 2) Motor Size 50W Maximum carrying weight Note 3) Vacuum rate Recommendation Note 4) Horizontal Vertical Normal grade:±0.01, high grade: ±0.005, precision grade: ±0.003 Note 1: Effective stroke is shortened according to the slider length. For details, confirm with the dimensional drawing. Note 2: Positioning repeatability is determined according to an ambient temperature is 20°C. Note 3: he guideline for the maximum carrying weight is the weight when the motor is at the rated...

Load rating and radial clearance Model no. Basic dynamic load rating C [N]Note) Basic static load rating C0 [N]Note) Basic dynamic load rating Ca [N] Basic static load rating C0a [N] Axial direction Normal grade, high grade Precision grade Bearing unit (Fixed side) Ball screw unit Ball screw lead [mm] Normal grade, high grade Normal grade, high grade Precision grade Basic dynamic load rating Ca [N] Basic static load rating P0a [N] Precision grade Note: The load ratings in the LM Guide unit indicate the load rating per inner block. Type Model CSKR-A (slider type A) Representative type of model...

Accuracy Standard The accuracy of model CSKR is defined in positioning repeatability, positioning accuracy, backlash and running parallelism (vertical). Positioning repeatability After repeated positioning to a given point in the same direction seven times, measure the resting point and calculate the value of half the maximum difference. Perform this measurement at the center and at both ends of the travel distance; the largest value becomes the measurement value, and the positioning repeatability is expressed by placing the symbol "±" next to the value of half the maximum difference. Positioning...

High grade (H) Model no. Outer rail length Positioning repeatability Positioning accuracy Running parallelism (vertical) Precision grade (P) Model no. Outer rail length Positioning repeatability Positioning accuracy Running parallelism (vertical)

Intermediate flange Outer rail length Stroke range (Slider A) Stroke range (Slider B) Detailed view of slider A Outer rail length [mm] Detailed view of slider B Reference main unit mass [kg] Note 1: The vacuum fittings can be mounted on either side. Note 2: The motor-wrap specification can also be provided. For more information, please contact THK. Model Number Chart ① Ball screw lead A (With one inner block)/B (With two inner blocks) ③ Outer rail length No symbol : Normal grade H : High grade P : Precision grade 0 : Without motor 1 : With motor 0 : Without sensor Attached table ( Page 17) :...

2-Vacuum fittings Connecting screw R1/8 for ø6 tube Detailed view of slider A Outer rail length [mm] Outer rail length Stroke range (Slider A) Stroke range (Slider B) Intermediate flange Detailed view of slider B Reference main unit mass [kg] Note 1: The vacuum fittings can be mounted on either side. Note 2: The motor-wrap specification can also be provided. For more information, please contact THK. Model Number Chart ① Ball screw lead No symbol : Normal grade H : High grade P : Precision grade 0 : Without motor 1 : With motor 0 : Without sensor Attached table ( Page 17) : With sensor Attached...

Detailed view of slider B Detailed view of slider A Stroke range [mm] Reference main unit mass [kg] Slider type A Note 1: The vacuum fittings can be mounted on either side. Note 2: The motor-wrap specification can also be provided. For more information, please contact THK. Model Number Chart ① Ball screw lead A (With one inner block)/B (With two inner blocks) ③ Outer rail length No symbol : Normal grade H : High grade P : Precision grade 0 : Without motor 1 : With motor 0 : Without sensor Attached table ( Page 17) : With sensor Attached table ( Pages 11 and 12) ⑧ Base plate (Optional) Outer rail...

Outer rail length Stroke range (Slider A) Stroke range (Slider B) View of A 2-ø5H7 depth 8 8-M6 depth 10 8 Detailed view of slider B Detailed view of slider A Outer rail length [mm] Intermediate flange 2-Vacuum fittings Connecting screw R1/4 for ø10 tube Reference main unit mass [kg] Slider type A Note 1: The vacuum fittings can be mounted on either side. Note 2: The motor-wrap specification can also be provided. For more information, please contact THK. Model Number Chart ① Ball screw lead No symbol : Normal grade H : High grade P : Precision grade 0 : Without motor 1 : With motor 0 : Without...

Optional Intermediate flange Intermediate flanges are available so that various motors may be mounted. Specify the intermediate flange suitable for your motor. Table of motors used and corresponding intermediate flanges (1) Motor type Yaskawa Electric MSMD 02 MAMA 02 MSMD 04 MAMA 04 Mitsubishi Electric Flange angle