Scios for Materials Science
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High Resolution and throughput for 2D and 3D analytical applications Maximum insight. FEI Scios™ is an ultra-high-resolution be productive quickly. In addition, features such as “undo” analytical DualBeam™ system that delivers outstanding 2D and “redo” encourage greater experimentation with peace and 3D performance for a broad range of samples, including magnetic material. With innovative features A 110 mm stage tilts up to 90˚ and provides a long, designed to increase throughput, precision, and ease of use, eucentric working distance for great flexibility. FEI Scios the FEI Scios is ideal for advanced research and analysis easily accommodates a wide range of sample types and across academic, government, and industrial research data collection techniques while simultaneously allowing maximum energy dispersive x-ray spectroscopy (EDS) Get faster time to data. Advanced detection technology signal detection at the FIB and SEM coincidence point. is at the very core of the FEI Scios. In-lens FEI Trinity™ detection technology collects all signals simultaneously, saving time and offering distinctly different contrasts to capture the maximum amount of data. An innovative, under-the-lens concentric backscatter detector enhances efficiency, enabling you to select a signal based on its angular distribution to easily separate materials and topographic contrast—even at 20 eV landing energy. Simplify high-precision sample prep. The proven FEI Sidewinder™ ion column accelerates sample preparation with high beam current density and a low-energy cleaning capability. Achieve highly precise transmission electron microscope (TEM) sample preparation with the ability to monitor focused ion beam (FIB) processing using the scanning electron microscope (SEM), which enables you to end-point on even the smallest features. An integrated 16-bit patterning engine provides superior control of the FIB and KEY BENEFITS Get more data from difficult materials: Best-in-class resolution and contrast deliver more data and better information, even on magnetic materials. Get answers faster: A high-throughput FIB accelerates performance to shorten time to answers. Capture detail more easily: Widest variety of signals available simultaneously with FEI Trinity In-lens detection technology. Increase usability and confidence: A high degree of automation makes FEI Scios easy to use and encourages greater experimentation with more confidence. Improve sample preparation precision: 16-bit digital patterning and imaging delivers best-in-class beam control and signal processing for greater precision. Tailor your solution: A flexible DualBeam configuration is easily optimized to meet your specific requirements. SEM during all patterning steps. Provide flexibility and ease of use. Simplify use and maintenance with the FEI Scios’ attention to detail. The FEI NICol™ electron column is specifically designed for ease of use and flexibility. Greatly reduce the need for operators to adjust settings with fully automated column alignment. Eliminate mechanical alignment concerns with an optimized field emission gun (FEG) design. The FEI Scios also offers user guidance, making it easy for novice users to  Coated wire. Cross-section of a coated wire at a defect location.

Stage and Sample ·· Maximum horizontal field width: 4.0 mm at 7 mm WD (corresponds to 30× minimum magnification in quad view) ·· Extra wide field of view (1×) available through standard navigation montage Chamber ·· Left to right: 379 mm ·· Analytical working distance: 7 mm ·· STEM retractable segmented detector (BF, DF, HADF, HAADF)* ·· IR-CCD ·· Nav-Cam™ chamber mounted camera* Vacuum System ·· Complete oil free vacuum system ·· 1 × 220 l/s TMP ·· 1 × PVP-scroll ·· 3 × IGP NICol UHR Non-Immersion FESEM Column High resolution field emission-SEM ·· Chamber vacuum (high vacuum) < 6.3 × 10-6...

STAGE SPECIFICATIONS Type Eucentric goniometer stage, 5-axes motorized Clearance 85 mm to eucentric point 500 g in any stage position (up to 2 kg at 0° tilt) 150 mm with full rotation (larger samples possible with limited rotation) Image Processor ·· Dwell time range from 0.025 – 25000 µs/pixel ·· Up to 6144 × 4096 pixels ·· File type: TIFF (8, 16, 24 bit), BMP or JPEG, standard ·· FEI Gas injection: up to 4 units (other accessories may limit number of GIS available) for beam-induced deposition and etching from a choice of > 10 precursors, e.g. -- Platinum ·· Single-frame or 4-view image...

Installation Requirements (Refer to preinstall guide for detailed data) ·· Power: -- voltage 100 – 240 V AC (-6%, +10%) -- frequency 50 or 60 Hz (±1%) -- consumption: < 3.0 kVA for basic microscope ·· Earth resistance < 0.1Ω ·· Environment: -- temperature 20°C ±3°C -- relative humidity below 80% RH -- stray AC magnetic elds < 40 nT a-synchronous, < 300 nT synchronous for line times, > 20 ms (50 Hz mains) or > 17 ms (60 Hz mains) ·· Minimum door size: 0.9 m wide × 1.9 m high ·· Weight: column console 980 kg ·· Dry nitrogen ·· Compressed air 4–6 bar —  clean, dry and oil-free ·· System...