Helios 5 Laser Hydra System Fast high-quality subsurface and 3D characterization at millimeter scale with nanometer resolution The Thermo Scientific Helios 5 Laser Hydra System delivers unmatched capabilities for extreme large-volume 3D analysis, Ga-free sample preparation, and precise micromachining. Featuring an innovative, fully integrated femtosecond laser, it offers fast material removal rate with high cut face quality. The Thermo Scientific™ Helios™ 5 Laser Hydra System is part of the fifth generation of the industry-leading Helios family. It combines the innovative Thermo Scientific Elstar™ SEM Column, for ultra-high-resolution imaging and excellent analytical capabilities, with a new novel multiple ion species plasma focused ion beam (PFIB) column delivering exceptional performance at all operating conditions. The addition of a femtosecond laser enables in situ ablation at unprecedented Key Benefits Fast material removal for millimeter-scale cross sections with a material removal rate up to 15,000x faster than a typical Ga FIB Statistically relevant subsurface and 3D data analysis by acquiring much larger volumes within a shorter amount of time Accurate and repeatable cut placement with triple beam coincidence on the sample Fast characterization of deep subsurface features via extraction of subsurface TEM lamella or chunks for 3D analysis High-throughput processing of challenging materials such as non-conductive or ion-beam-sensitive materials Fast and easy characterization of air-sensitive samples without the need to transfer samples between different instruments for imaging and cross-sectioning All capabilities of proven Helios 5 Hydra platform, including high-quality Ga-free TEM and APT sample preparation and extreme high-resolution imaging capabilities material removal rates for fast millimeter-scale characterization at nanometer resolution. Statistically relevant subsurface and 3D characterization The femtosecond laser provides the capability to cut materials orders of magnitude faster than a Ga FIB. For many materials, a large cross-section of hundreds of microns can be created within 5 minutes. Featuring a different removal mechanism (ablation vs ion sputtering), the laser can easily process challenging materials, such as non-conductive or ion-beamsensitive samples; for example: glass, ceramics, hard and soft polymers, biomaterials, graphite, etc. Moreover, a protective coating to reduce charge or to mitigate curtain artifacts is not needed, further saving time and increasing total throughput. The Helios 5 Laser Hydra System is designed with all three beams (SEM/FIB/laser) pointing at a single coincident point, enabling very short laser/ SEM switching times and no vacuum transfers. This provides high-precision in situ feedback, making it a unique solution for fully automated, ultra-large-volume 3D characterization using laser tomography. 100 μm Laser tomography of a carbon-fiber-reinforced composite in ep

High-quality, large-volume analysis The ultra-short duration of the femtosecond laser pulses introduces almost no artifacts while delivering much higher sitespecific accuracy compared to traditional mechanical polishing techniques, where, for example, delamination is often an issue. The femtosecond laser induces no heat impact, no microcracks, and no melting effects. In most cases, femtosecond laser-milled surfaces are clean enough for direct SEM imaging, and the quality is often sufficient for surface sensitive EBSD mapping. When it is necessary to improve the surface quality even further, a...

Overview of Helios 5 Laser Hydra System applications Metals (conductive) 100 µm Steel produced by additive manufacturing. 200 µm 3D quantitative analysis of Li-ion battery graphite anode. Semiconductors (conductive/non-conductive) 100 µm 3D reconstruction of a solder bump. Polymers (non-conductive, electron beam-sensitive) Carbon-fiber-reinforced epoxy composite. Glass/ceramics (non-conductive, thermally sensitive, shock-sensitive) 10 µm Packaged solid-state battery.

Description FIB PFIB Femtosecond Laser For research use only. Not for use in diagnostic procedures. For current certifications, visit thermofisher.com/certifications © 2022 Thermo Fisher Scientific Inc. All rights reserved. All trademarks are the property of Thermo Fisher Scientific and its subsidiaries unless otherwise specified. DS0487-EN-07-2022